Large area YBa2Cu3O7 and Tl2Ba2CaCU2O8 thin films for microwave and electronic applications

被引：8

作者：

Face, DW ^{[1
]}

Small, RJ ^{[1
]}

Warrington, MS ^{[1
]}

Pellicone, FM ^{[1
]}

Martin, PJ ^{[1
]}

机构：

[1] Dupont Superconduct, Wilmington, DE 19880 USA

来源：

PHYSICA C | 2001年 / 357卷 / SUPPL. 1期

关键词：

Tl2Ba2CaCu2O8; YBa2Cu3O7; superconductor; thin films; microwave;

D O I：

10.1016/S0921-4534(01)00566-4

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper reviews recent work at DuPont to develop high performance Tl2Ba2CaCu2O8 and YBa2Cu3O7 thin films for microwave and electronic device applications. The YBa2Cu3O7 thin films are produced by off-axis magnetron sputtering onto radiatively heated substrates and have surface roughness levels of less than 1 nm over 2 in. diameter wafers as determined by atomic force microscopy. Double-sided Tl2Ba2CaCu2O8 films are produced on 3 in. diameter CeO2 buffered sapphire substrates with excellent uniformity of structural and electrical properties. These films have low microwave surface resistance up to high microwave power levels. We also report on the establishment of a Six Sigma manufacturing capability for Tl2Ba2CaCu2O8 films. These films are used to fabricate a compact high performance eight-pole bandpass filter operating at 1.85 GHz and 80 K. (C) 2001 Published by Elsevier Science B.V.

引用

页码：1488 / 1494

页数：7

共 5 条

[1] BUFFER LAYER FILM INTERACTIONS IN THE GROWTH OF TL2BA2CA1CU2OX FILMS ON CEO2 BUFFERED SAPPHIRE [J].