Deep-UV laser direct writing of photoluminescent ZnO submicron patterns: an example of nanoarchitectonics concept

被引:4
作者
Kirscher, Quentin [1 ,2 ]
Hajjar-Garreau, Samar [1 ,2 ]
Grasset, Fabien [3 ,4 ]
Berling, Dominique [1 ,2 ]
Soppera, Olivier [1 ,2 ]
机构
[1] Univ Haute Alsace, UMR CNRS UHA 7361, Inst Sci Mat Mulhouse IS2M, Mulhouse, France
[2] Univ Strasbourg, Strasbourg, France
[3] Natl Inst Mat Sci NIMS, Lab Innovat Key Mat & Struct LINK, IRL 3629, CNRS St Gobain NIMS, Tsukuba, Ibaraki, Japan
[4] Univ Rennes, CNRS, ISCR, UMR6226, Rennes, France
关键词
ZnO; nanocrystals; photolithography; photoluminescence; optical coatings; nanoarchitectonics; DIRECT OPTICAL LITHOGRAPHY; NANOCRYSTALS; COLLOIDS; SIZE; NANOSTRUCTURES; CLUSTERS;
D O I
10.1080/14686996.2022.2116294
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Micro- and nanopatterning of metal oxide materials is an important process to develop electronic or optoelectronic devices. ZnO is a material of choice for its semiconducting and photoluminescence properties. In the frame of the nanoarchitectonics concept, we have developed and investigated a new process that relies on direct writing laser patterning in the Deep-UV (DUV) range to prepare photoluminescent microstructures of ZnO at room temperature, under air. This process is based on a synthesis of colloidal ZnO nanocrystals (NCs) with a careful choice of the ligands on the surface to obtain an optimal (i) stability of the colloids, (ii) redissolution of the non-insolated parts and (iii) cross-linking of the DUV-insolated parts. The mechanisms of photocrosslinking are studied by different spectroscopic methods. This room temperature process preserves the photoluminescence properties of the NCs and the wavelength used in DUV allows to reach a sub-micrometer resolution, which opens new perspectives for the integration of microstructures on flexible substrates for optoelectronic applications.
引用
收藏
页码:535 / 546
页数:12
相关论文
共 43 条
  • [1] Efficient Pump Photon Recycling via Gain-Assisted Waveguiding Energy Transfer
    Aad, Roy
    Couteau, Christophe
    Blaize, Sylvain
    Chastaing, Evelyne
    Soyer, Francoise
    Divay, Laurent
    Galindo, Christophe
    Le Barny, Pierre
    Sallet, Vincent
    Sarte, Corinne
    Lusson, Alain
    Galtier, Pierre
    Rocha, Licinio
    Simic, Vesna
    Lerondel, Gilles
    [J]. ACS PHOTONICS, 2014, 1 (03): : 246 - 253
  • [2] Nanoarchitectonics: what's coming next after nanotechnology?
    Ariga, Katsuhiko
    [J]. NANOSCALE HORIZONS, 2021, 6 (05) : 364 - 378
  • [3] Self-assembly as a key player for materials nanoarchitectonics
    Ariga, Katsuhiko
    Nishikawa, Michihiro
    Mori, Taizo
    Takeya, Jun
    Shrestha, Lok Kumar
    Hill, Jonathan P.
    [J]. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2019, 20 (01) : 51 - 95
  • [4] SYNTHESIS AND CHARACTERIZATION OF TITANIUM OXIDE-BASED GELS SYNTHESIZED FROM ACETATE MODIFIED TITANIUM BUTOXIDE PRECURSORS
    BARBOUXDOEUFF, S
    SANCHEZ, C
    [J]. MATERIALS RESEARCH BULLETIN, 1994, 29 (01) : 1 - 13
  • [5] Self-assembly of nanocrystals into strongly electronically coupled all-inorganic supercrystals
    Coropceanu, Igor
    Janke, Eric M.
    Portner, Joshua
    Haubold, Danny
    Nguyen, Trung Dac
    Das, Avishek
    Tanner, Christian P. N.
    Utterback, James K.
    Teitelbaum, Samuel W.
    Hudson, Margaret H.
    Sarma, Nivedina A.
    Hinkle, Alex M.
    Tassone, Christopher J.
    Eychmuller, Alexander
    Limmer, David T.
    de la Cruz, Monica Olvera
    Ginsberg, Naomi S.
    Talapin, Dmitri, V
    [J]. SCIENCE, 2022, 375 (6587) : 1422 - +
  • [6] Optical properties of ZnO nanostructures
    Djurisic, Aleksandra B.
    Leung, Yu Hang
    [J]. SMALL, 2006, 2 (8-9) : 944 - 961
  • [7] Thiocyanate-Capped Nanocrystal Colloids: Vibrational Reporter of Surface Chemistry and Solution-Based Route to Enhanced Coupling in Nanocrystal Solids
    Fafarman, Aaron T.
    Koh, Weon-kyu
    Diroll, Benjamin T.
    Kim, David K.
    Ko, Dong-Kyun
    Oh, Soong Ju
    Ye, Xingchen
    Doan-Nguyen, Vicky
    Crump, Michael R.
    Reifsnyder, Danielle C.
    Murray, Christopher B.
    Kagan, Cherie R.
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2011, 133 (39) : 15753 - 15761
  • [8] Stimulated emission from ZnO thin films with high optical gain and low loss
    Gadallah, A. -S.
    Nomenyo, K.
    Couteau, C.
    Rogers, D. J.
    Lerondel, G.
    [J]. APPLIED PHYSICS LETTERS, 2013, 102 (17)
  • [9] Design of new M@ZnO nanocolloids: synthesis and shaping
    Grasset, F.
    Cordier, S.
    Molard, Y.
    Perrin, C.
    Nazabal, V.
    Guilloux-Viry, M.
    Pechev, S.
    Saito, N.
    Ryoken, H.
    Haneda, H.
    Sasaki, T.
    [J]. INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2008, 5 (6-8) : 708 - 721
  • [10] From ZnO colloids to nanocrystalline colored ZnxTiyOw-zNz spinel films
    Grasset, F
    Starukh, G
    Spanhel, L
    Ababou-Girard, S
    Su, DS
    Klein, A
    [J]. ADVANCED MATERIALS, 2005, 17 (03) : 294 - +