A new design principle for the photoactive components (PACs) of dissolution inhibition resists

The photoreactive function and the inhibitor function of the Photoactive components (PACs) of dissolution inhibition resists are independent of each other and have to be considered and developed separately. Traditionally, dissolution inhibitors have been designed by trial and error. Here we are concerned with a rational approach to inhibitor design based on the proposition that the inhibition strength of a molecule depends directly on the electron density on the oxygen atom of its acceptor group. Any structural change that increases the electron density on the acceptor increases also the inhibition factor of the molecule. Several routes to more effective inhibitors are indicated.