X-ray optics and beam characterization using random modulation: experiments

被引：32

作者：

Berujon, Sebastien ^{[1
]}

Cojocaru, Ruxandra ^{[1
]}

Piault, Pierre ^{[1
]}

Celestre, Rafael ^{[1
]}

Roth, Thomas ^{[1
]}

Barrett, Raymond ^{[1
]}

Ziegler, Eric ^{[1
]}

机构：

[1] European Synchrotron Radiat Facil, CS 40220, F-38043 Grenoble 9, France

来源：

JOURNAL OF SYNCHROTRON RADIATION | 2020年 / 27卷

关键词：

speckle; near-field speckle-based phase-sensing; metrology; at-wavelength metrology; optics; AT-WAVELENGTH METROLOGY; FRONT; MIRRORS;

D O I：

10.1107/S1600577520000508

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A parallel paper [Berujon, Cojocaru, Piault, Celestre, Roth, Barrett & Ziegler (2020), J. Synchrotron Rad. 27, 284-292] reviewed theoretically some of the available processing schemes for X-ray wavefront sensing based on random modulation. Shown here are experimental applications of the technique for characterizing both refractive and reflective optical components. These fast and accurate X-ray at-wavelength metrology methods can assist the manufacture of X-ray optics that transport X-ray beams with a minimum amount of wavefront distortion. It is also recalled how such methods can facilitate online optimization of active optics.

引用

页码：293 / 304

页数：12

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