Thermal control system based on thin film heaters and amorphous silicon diodes

被引：0

作者：

Lovecchio, Nicola ^{[1
]}

Petrucci, Giulia ^{[1
]}

Caputo, Domenico ^{[1
]}

Alameddine, Samia ^{[1
]}

Carpentiero, Matteo ^{[1
]}

Martini, Luca ^{[1
]}

Parisi, Emanuele ^{[1
]}

de Cesare, Giampiero ^{[1
]}

Nascetti, Augusto ^{[2
]}

机构：

[1] Univ Roma La Sapienza, Dept Informat Elect & Telecommun Engn, Via Eudossiana 18, I-00184 Rome, Italy

[2] Univ Roma La Sapienza, Dept Astronaut Elect & Energy Engn, I-00138 Rome, Italy

来源：

2015 6TH IEEE INTERNATIONAL WORKSHOP ON ADVANCES IN SENSORS AND INTERFACES (IWASI) | 2015年

关键词：

thermal control; lab-on-chip; thin film heaters; temperature sensors; amorphous silicon diodes; CHIP; LAB;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present a system able to perform thermal treatments on lab-on-chip devices fabricated on glass substrates. The system includes a thin film resistor acting as heater and thin film hydrogenated amorphous silicon diodes acting as temperature sensors. An electronic system controls the lab-on-chip temperature through a Proportional-Integral Derivative algorithm. In particular, an electronic board infers the system temperature measuring the voltage across the amorphous silicon diodes and drives the heater to achieve the set-point temperature. Taking into account the 16-bit ADC resolution and the sensors sensitivity, which is around 3.6 mV/degrees C, we estimate that our system is able to detect temperature variation as low as 3.5.10(-3) degrees C. Furthermore, the experimental results show that the system is able to stabilize the system temperature with a precision better than 0.1 degrees C.

引用

页码：277 / 282

页数：6

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