Ultraviolet to far-infrared dielectric function of n-doped cadmium oxide thin films

被引:25
作者
Nolen, J. Ryan [1 ]
Runnerstrom, Evan L. [2 ,3 ]
Kelley, Kyle P. [2 ]
Luk, Ting S. [4 ,5 ]
Folland, Thomas G. [6 ]
Cleri, Angela [7 ]
Maria, Jon-Paul [7 ]
Caldwell, Joshua D. [6 ]
机构
[1] Vanderbilt Univ, Interdisciplinary Mat Sci Program, 221 Kirkland Hall, Nashville, TN 37235 USA
[2] North Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC USA
[3] CDCC US Army Res Lab, Army Res Off, Res Triangle Pk, NC USA
[4] Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA
[5] Sandia Natl Labs, Ctr Integrated Nanotechnol, POB 5800, Albuquerque, NM 87185 USA
[6] Vanderbilt Univ, Dept Mech Engn, Nashville, TN 37235 USA
[7] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA
关键词
SURFACE-PLASMON RESONANCE; PHONON POLARITONS; LARGE-AREA; TRANSPARENT; EPSILON; SILICON; ABSORPTION; SEMICONDUCTORS; CONDUCTIVITY; SCATTERING;
D O I
10.1103/PhysRevMaterials.4.025202
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Spectroscopic ellipsometry and Fourier transform infrared spectroscopy were applied to extract the ultraviolet to far-infrared (150-33333 cm(-1)) complex dielectric functions of high-quality, sputtered indium-doped cadmium oxide (In:CdO) thin crystalline films on MgO substrates possessing carrier densities (N-d) ranging from 1.1x 10(19) cm(-3) to 4.1x 10(20) cm(-3). A multiple oscillator fit model was used to identify and analyze the three major contributors to the dielectric function and their dependence on doping density: interband transitions in the visible, free-carrier excitations (Drude response) in the near- to far-infrared, and IR-active optic phonons in the far-infrared. More specifically, values pertinent to the complex dielectric function such as the optical band gap (E-g), are shown here to be dependent upon carrier density, increasing from approximately 2.5-3 eV, while the high-frequency permittivity (epsilon(infinity)) decreases from 5.6 to 5.1 with increasing carrier density. The plasma frequency (omega(p)) scales as root N-d, resulting in omega(p) values occurring within the mid- to near-IR, and the effective mass (m*) was also observed to exhibit doping density-dependent changes, reaching a minimum of 0.11m(0) in unintentionally doped films (1.1 x10(19) cm(-3)). Good quantitative agreement with prior work on polycrystalline, higher-doped CdO films is also demonstrated, illustrating the generality of the results. The analysis presented here will aid in predictive calculations for CdO-based next-generation nanophotonic and optoelectronic devices, while also providing an underlying physical description of the key properties dictating the dielectric response in this atypical semiconductor system.
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页数:10
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