Study on a Novel Capacitive Pressure Sensor with Large Dynamic Range

被引：0

作者：

Zhang Tongtong ^{[1
,2
]}

Zhang Zhengyuan ^{[2
]}

机构：

[1] Chongqing Univ Posts & Telecommun, Chongqing 400060, Peoples R China

[2] Natl Lab Analog Integrated Circuits, Chongqing 400060, Peoples R China

来源：

PROCEEDINGS OF THE 2015 INTERNATIONAL INDUSTRIAL INFORMATICS AND COMPUTER ENGINEERING CONFERENCE | 2015年

关键词：

capacitive pressure sensor; circular flat diaphragm; large dynamic range;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, a novel capacitive pressure sensor with large dynamic range is presented. The working principle and the design structure of the sensor are demonstrated in the paper, then the theoretical calculation of mechanical properties, capacitance and the simulate results are performed. The study shows that the sensitivity of this capacitive pressure transducers is about 0.094f F/h Pa over the range of 20 similar to 100k Pa. The advantage of the structure is that it has a large dynamic range, higher tolerance against the environment than others and the measure flexible according to the demand.

引用

页码：396 / 399

页数：4