An instrument for surface roughness measurement of optical thin films

被引：4

作者：

Hou, HH ^{[1
]}

Kui, Y ^{[1
]}

Shao, J ^{[1
]}

Fan, ZX ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Res & Dev Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China

来源：

Optical Design and Testing II, Pts 1 and 2 | 2005年 / 5638卷

关键词：

total integrated scattering; roughness; optical thin films;

D O I：

10.1117/12.572611

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A total integrated scattering (TIS) instrument is presented. Its basic structure, theory foundation, and measurement principle are introduced. The surface root mean square (rms) roughness of single silver films on BK7 glass substrates is measured by employing this instrument. The results agree well with the data obtained by the optical profilometer and the atomic force microscope (AFM).

引用

页码：638 / 641

页数：4

共 8 条

[1] SCATTERING CHARACTERISTICS OF OPTICAL-MATERIALS [J].