Fully Reconfigurable Silicon Photonic Lattice Filters With Four Cascaded Unit Cells

被引：28

作者：

Djordjevic, Stevan S. ^{[1
]}

Luo, Lian Wee ^{[2
]}

Ibrahim, Salah ^{[1
]}

Fontaine, Nicolas K. ^{[1
]}

Poitras, C. B. ^{[2
]}

Guan, Binbin ^{[1
]}

Zhou, Linje ^{[1
]}

Okamoto, Katsunari ^{[1
]}

Ding, Zhi ^{[1
]}

Lipson, Michal ^{[2
]}

Yoo, S. J. B. ^{[1
]}

机构：

[1] Univ Calif Davis, Dept Elect & Comp Engn, Davis, CA 95616 USA

[2] Cornell Univ, Ithaca, NY 14850 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2011年 / 23卷 / 01期

关键词：

CMOS compatible photonics; photonic reconfigurable filters; silicon ring resonators; DELAY;

D O I：

10.1109/LPT.2010.2090868

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a fully reconfigurable optical filter built by cascading four identical unit cells. The devices are fabricated using two distinct methods: a complementary metal-oxide-semiconductor (CMOS) compatible process utilizes deep ultraviolet (DUV) lithography with tuning elements defined by ion implantation to make lateral p-i-n diodes for current injection regions, while an electron beam (E-beam) lithography process uses nickel chrome (NiCr) heaters as tuning elements. The fabricated devices are characterized using swept optical vector network analyzer (OVNA) coherent measurements.

引用

页码：42 / 44

页数：3

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