Probe measurements of magnetron discharge parameters

被引：3
|
作者：
Karzin, V. [1 ]
Smirnov, V. [1 ]
机构：
[1] St Petersburg State Electrotech Univ LETI, 5 Prof Popov St, St Petersburg 194354, Russia
来源：
23RD INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY | 2016年 / 729卷
关键词：
D O I：
10.1088/1742-6596/729/1/012021
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Langmuir probe measurements have been carried out in a positive column discharge of a planar magnetron with a titanium target. In this work concentration and temperature of electrons is measured in positive column of magnetron discharge with Langmuir probe. Concentration of electrons is found to be on the level of 1016 m(-3) at a notable distance ( over 200 mm). Two groups of electrons exist: << cold >> and << hot >> with average temperature of 16 000 and 41 000 K respectively. Dependence of discharge parameters on working gas pressure is measured.
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页数：3
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