A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability

被引：21

作者：

Zhang, Quanwei ^{[1
]}

Li, Cun ^{[1
]}

Zhao, Yulong ^{[1
]}

Zhang, Zichao ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2021年 / 21卷 / 20期

关键词：

Pressure sensors; Sensors; Vibrations; Pressure measurement; Resonators; Thermal stability; Force; ultra-high pressure; DETF; MEMS; quartz resonator;

D O I：

10.1109/JSEN.2021.3111310

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A quartz resonant pressure sensor for ultra-high pressure measurement has been designed and verified. The pressure conversion unit of the sensor is composed of a pressure cylinder and a flexible lever, which can accurately and efficiently meet the role of converting and passing the ultra-high pressure to the resonant unit. The resonant unit of the sensor uses quartz DETF resonators and forms a differential output structure to meets the requirements of high precision and stability. The theory of the overall sensor design scheme is consistent with the simulation results, which verifies the feasibility of the design scheme. The experimental results show that in the pressure range of 120 Mpa, the sensitivity of the ultra-high pressure sensor is 27.3 Hz/Mpa, the linearity reaches 0.0112%, and the total accuracy is 0.0365%. The sensor can be used for high-precision and high-stability detection of ultra-high pressure, which is necessary in special fields such as deep-sea exploration.

引用

页码：22553 / 22561

页数：9

共 50 条

[21] AN ULTRA-HIGH SENSITIVITY, CAPACITIVE PRESSURE SENSOR USING IONIC LIQUID
Yan, John
Pan, Tingrui
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 557 - 560
[22] Research on the fiber-optic sensor for measuring ultra-high pressure
Guangzi Xuebao, 1 (63):
[23] Ultra-high excess argon in kyanites: Implications for ultra-high pressure metamorphism in northeast Japan
Itaya, T
Hyodo, H
Uruno, K
Mikoshiba, MU
GONDWANA RESEARCH, 2005, 8 (04) : 617 - 621
[24] The Experimental and Numerical Study of the Stability of Ultra-high Pressure Water Jet
Gong, Chen
Yang, Minguan
ENERGY DEVELOPMENT, PTS 1-4, 2014, 860-863 : 1495 - 1498
[25] Recent Developments in High Precision Quartz and Langasite Pressure Sensors for High Temperature and High Pressure Applications
Sinha, Bikash K.
Patel, Mihir S.
2016 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS), 2016, : 502 - 514
[26] Research on the Pressure Control Technology of Ultra-high Temperature & High Pressure Rheometer
Han Tianfu
Li Meinan
Chen Yanbin
Wang Qi
2014 INTERNATIONAL (CHINA) GEOLOGICAL ENGINEERING DRILLING TECHNOLOGY CONFERENCE (IGEDTC2014), 2014, 73 : 172 - 177
[27] A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement
Zhang, Guodong
Zhao, Yulong
Zhao, Yun
Wang, Xinchen
Wei, Xueyong
Ren, Wei
Li, Hui
Zhao, You
SENSORS, 2018, 18 (03):
[28] A RESONANT HIGH-PRESSURE SENSOR WITH HIGH STRENGTH DESIGN
Yu, Jie
Lu, Yulan
Chen, Deyong
Wang, Junbo
Chen, Jian
Xie, Bo
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, : 78 - 81
[29] Ultra-high resolution coded wavefront sensor
Wang, Congli
Dun, Xiong
Fu, Qiang
Heidrich, Wolfgang
OPTICS EXPRESS, 2017, 25 (12): : 13736 - 13746
[30] A high sensitivity quartz resonant pressure sensor with differential output and self-correction
Zhang, Quanwei
Li, Cun
Zhao, Yulong
Li, Bo
Han, Chao
REVIEW OF SCIENTIFIC INSTRUMENTS, 2019, 90 (06):

← 1 2 3 4 5 →