Determination of optical constants of Si/ZnO polycrystalline nanocomposites by spectroscopic ellipsometry

被引：6

作者：

García-Serrano, J

Koshizaki, N

Sasaki, T

Martínez-Montes, G

Pal, U

机构：

[1] Univ Autonoma Puebla, Inst Fis, Puebla 72570, Mexico

[2] Univ Autonoma Estado Hidalgo, CIMyM, Pachuca 42074, Hidalgo, Mexico

[3] Natl Inst Adv Ind Sci & Technol, Nanoarchitecton Res Ctr, Tsukuba, Ibaraki 3058565, Japan

来源：

JOURNAL OF MATERIALS RESEARCH | 2001年 / 16卷 / 12期

关键词：

D O I：

10.1557/JMR.2001.0487

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The optical constants of Si/ZnO composite Films grown on quartz glass substrates were determined in the spectral range 1.5-5.0 eV by spectroscopic ellipsometry using a rotating-analyzer ellipsometer. The structure of the sample,,, was modeled by a two-phase (substrate-film) model, and the optical functions of the film were parameterized through different effective medium approximations. The results allowed us to estimate the microstructural film parameters, such as film thickness, the volume fractions of each of the constituents, and optical constants.

引用

页码：3554 / 3559

页数：6

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