NASICON thick film-based CO2 sensor prepared by a sol-gel method

被引:75
作者
Kida, T [1 ]
Miyachi, Y [1 ]
Shimanoe, K [1 ]
Yamazoe, N [1 ]
机构
[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, Dept Mol & Mat Sci, Kasuga, Fukuoka 8168580, Japan
关键词
NASICON; CO2; sensor; sol-gel method; thick film; planar device;
D O I
10.1016/S0925-4005(01)00878-4
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Thick films of NASICON (Na+ conductor, Na3Zr2Si2PO12) were prepared for the fabrication of a planar CO2 sensor. The powder of a precursor of NASICON, derived through a sol-gel process, was screen-printed on an alumina substrate and converted into a NASICON thick film by calcination. The formation of crystalline NASICON was almost complete after calcination at 900 and 1000 degreesC, but the films remained rather poor in densification. On the other hand, the films were densified after calcination at 1100 degreesC or above, but NASICON phase disappeared by decomposition. The planar CO2 Sensor device was thus fabricated by using the NASICON thick film (30 gm thick) calcined at 1000 degreesC. The device attached with a binary carbonate auxiliary phase (Li2CO3-BaCO3) showed fairly good CO2 sensing properties at 450-600 degreesC. despite rather poor densification of the thick film used. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:28 / 32
页数:5
相关论文
共 10 条
  • [1] THIN AND THICK-FILM ELECTROCHEMICAL CO2 SENSORS
    CHU, WF
    FISCHER, D
    ERDMANN, H
    ILGENSTEIN, M
    KOPPEN, H
    LEONHARD, V
    [J]. SOLID STATE IONICS, 1992, 53 : 80 - 84
  • [2] K2CO3 SOLID ELECTROLYTE AS A CO2 PROBE - DECOMPOSITION MEASUREMENTS OF CACO3
    COTE, R
    BALE, CW
    GAUTHIER, M
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (01) : 63 - 67
  • [3] A study of healing-up characteristics of solid-electrolyte type CO2 sensors
    Futata, H
    Ogino, K
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1998, 52 (1-2) : 112 - 118
  • [4] PREPARATION OF NASICON THIN-FILMS BY DIP-COATING ON SI/SIO2 WAFERS AND CORRESPONDING C-V MEASUREMENTS
    HUANG, YL
    CANEIRO, A
    ATTARI, M
    FABRY, P
    [J]. THIN SOLID FILMS, 1991, 196 (02) : 283 - 294
  • [5] Carbonate based CO2 sensors with high performance
    Lang, T
    Wiemhofer, HD
    Gopel, W
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1996, 34 (1-3) : 383 - 387
  • [6] LEONHARD V, 1993, SENSOR ACTUAT B-CHEM, V13, P530
  • [7] POTENTIOMETRIC GAS SENSOR FOR CARBON-DIOXIDE USING SOLID ELECTROLYTES
    MARUYAMA, T
    SASAKI, S
    SAITO, Y
    [J]. SOLID STATE IONICS, 1987, 23 (1-2) : 107 - 112
  • [8] CARBON-DIOXIDE SENSOR USING SODIUM-ION CONDUCTOR AND BINARY CARBONATE AUXILIARY ELECTRODE
    MIURA, N
    YAO, S
    SHIMIZU, Y
    YAMAZOE, N
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (05) : 1384 - 1388
  • [9] SOLID ELECTROLYTE CO2 SENSOR USING NASICON AND LI-BASED BINARY CARBONATE ELECTRODE
    YAO, S
    HOSOHARA, S
    SHIMIZU, Y
    MIURA, N
    FUTATA, H
    YAMAZOE, N
    [J]. CHEMISTRY LETTERS, 1991, (11) : 2069 - 2072
  • [10] SOLID ELECTROLYTE CO2 SENSOR USING BINARY CARBONATE ELECTRODE
    YAO, S
    SHIMIZU, Y
    MIURA, N
    YAMAZOE, N
    [J]. CHEMISTRY LETTERS, 1990, (11) : 2033 - 2036