Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon

被引：5
作者：
Xia, Yuanlin [1 ]
Suzuki, Makoto [1 ]
Xue, Peidong [1 ]
Hirai, Yoshikazu [1 ]
Tsuchiya, Toshiyuki [1 ]
机构：
[1] Kyoto Univ, Dept Micro Engn, Kyoto 6158540, Japan
来源：
INTERNATIONAL JOURNAL OF FATIGUE | 2022年 / 162卷
关键词：
Fabrication process; Fracture strength; Fatigue life; Torsional beam; Micromirror; SPECIMENS; TENSILE; STRESS;
D O I：
10.1016/j.ijfatigue.2022.106983
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
We evaluated the effects of the source wafers [bare silicon (Si) and silicon-on-insulator (SOI)] and fabrication process on the fracture strength and fatigue life of micromirrors. The fracture strength of the Si-made micromirrors was 10-30% lower than that of the SOI-made ones. The decrease in strength was caused by the sidewall roughness. The low fracture strength shortened the fatigue life of the Si-made mirrors, but there is no significant difference in fatigue exponents between the Si- and SOI-made samples. By improving the fabrication process, we will be able to realize highly reliable Si-made micromirrors at a low cost.
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页数：8
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