Epitaxial growth of Nb films and Nb/Cu bilayers on Al2O3 substrates by DC magnetron sputtering

被引：3
|
作者：
Loloee, R [1 ]
Crimp, MA [1 ]
Zhu, W [1 ]
Pratt, WP [1 ]
机构：
[1] Michigan State Univ, Dept Mech & Mat Sci, E Lansing, MI 48824 USA
来源：
MECHANISMS AND PRINCIPLES OF EPITAXIAL GROWTH IN METALLIC SYSTEMS | 1998年 / 528卷
关键词：
D O I：
10.1557/PROC-528-203
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Epitaxial single crystal Nb films have been grown by sputter deposition on(1 1 (2) over bar 0) sapphire substrates. Subsequently, high quality epitaxial Cu films, with two orientation variants, have been grown onto the epitaxial Nb films. The sputtered films have been characterized using atomic force microscopy, electron backscattered patterns, and conventional transmission electron microscopy.
引用
收藏
页码：203 / 208
页数：6
相关论文
共 50 条
  • [31] ON THE ATOMIC-STRUCTURE OF THE NB/AL2O3 INTERFACE AND THE GROWTH OF AL2O3 PARTICLES
    KUWABARA, M
    SPENCE, JCH
    RUHLE, M
    JOURNAL OF MATERIALS RESEARCH, 1989, 4 (04) : 972 - 977
  • [32] INSITU GROWTH OF EPITAXIAL YBA2CU3O7 THIN-FILMS BY ON-AXIS UNBALANCED DC MAGNETRON SPUTTERING
    SAVVIDES, N
    KATSAROS, A
    THIN SOLID FILMS, 1993, 228 (1-2) : 182 - 185
  • [33] Elimination of Arcing in Reactive Sputtering of Al2O3 Thin Films Prepared by DC Pulse Single Magnetron
    Meissner, Michal
    Tolg, Tomas
    Baroch, Pavel
    Musil, Jindrich
    PLASMA PROCESSES AND POLYMERS, 2011, 8 (06) : 500 - 504
  • [34] Influence of the transparency of tunnel barriers in Nb/Al2O3/Al/Al2O3/Nb junctions on transport properties
    Cassel, D
    Pickartz, G
    Siegel, M
    Goldobin, E
    Kohlstedt, HH
    Brinkman, A
    Golubov, AA
    Kupriyanov, MY
    Rogalla, H
    PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2001, 350 (3-4): : 276 - 290
  • [35] Obtaining Al2O3 films for optical purposes by ac magnetron sputtering
    Meshkov, BB
    Yakovlev, PP
    JOURNAL OF OPTICAL TECHNOLOGY, 2000, 67 (09) : 834 - 836
  • [36] Al2O3 films deposited by plasma source enhanced magnetron sputtering
    Lei, MK
    Yuan, LJ
    Zhang, ZL
    JOURNAL OF INORGANIC MATERIALS, 2002, 17 (04) : 887 - 890
  • [37] Epitaxial growth of YBCO thin films on Al2O3 substrates by pulsed laser deposition
    Kim, IS
    Lim, HR
    Park, YK
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1999, 9 (02) : 1649 - 1652
  • [38] Epitaxial growth of hcp/fcc Co bilayer films on Al2O3(0001) substrates
    Ohtake, Mitsuru
    Futamoto, Masaaki
    Kirino, Fumiyoshi
    Fujita, Norihito
    Inaba, Nobuyuki
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)
  • [39] Epitaxial AlN thin films grown on α-Al2O3 substrates by ECR dual ion beam sputtering
    Okano, Hiroshi
    Tanaka, Naoki
    Kobayashi, Masami
    Usuki, Tatsuro
    Shibata, Kenichi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1995, 34 (9 B): : 5172 - 5177
  • [40] INVESTIGATION OF AL2O3 LAYERS OBTAINED BY DC PLANAR-MAGNETRON SPUTTERING
    KIROV, KI
    ATANASOVA, ED
    IVANOV, NA
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 50 (01): : 363 - 368
12345