Developments in THz-Range Ellipsometry: Quasi-Optical Ellipsometer

被引:18
作者
Galuza, Alexey A. [1 ]
Kiseliov, Vladimir K. [2 ]
Kolenov, Ivan V. [1 ]
Belyaeva, Alla I. [3 ]
Kuleshov, Yevgeny M. [2 ]
机构
[1] Natl Acad Sci Ukraine, Inst Electrophys & Radiat Technol, UA-61002 Kharkov, Ukraine
[2] Natl Acad Sci Ukraine, A Ya Usikov Inst Radiophys & Elect, UA-61085 Kharkov, Ukraine
[3] Natl Tech Univ Kharkov Politech Inst, UA-61002 Kharkov, Ukraine
关键词
Ellipsometry; hollow dielectric beamguide (HDB); spectroscopy; terahertz (THz); TERAHERTZ; KHARKOV;
D O I
10.1109/TTHZ.2016.2525732
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel experimental setup for multiangular ellipsometric measurements in terahertz spectral range 0.1-1 THz is described. The instrument operates in polarizer-compensator-sample-analyzer configuration and allows various measurement schemes (e.g., null and rotating analyzer). The ellipsometer is based on quasi-optical transmittance line-hollow dielectric beamguide (HDB)-and a kit of HDB-based components that provided main advantages of the ellipsometer as compared with known analogs. HDB provides almost flat phase front of the radiation on the entire channel cross section without any lenses or mirrors. Ultra-broadband quasi-optical transmittance line provides operation of the ellipsometer within 0.1-1 THz frequency range without any modifications of configuration and/or construction. This setup can be assembled/disassembled very easily (as a LEGO meccano) and is easily integrated into other equipment. Experimental testing of the ellipsometer was carried out by comparing dielectric constants of a set of materials measured by the setup with reference data and with the results of independent reflectometry measurements.
引用
收藏
页码:183 / 190
页数:8
相关论文
共 24 条
[1]  
Azzam R.M. A., 1996, Ellipsometry and polarized light
[2]   Modification of optical properties of recrystallized tungsten due to the change in surface morphology induced by deuterium ion bombardment [J].
A. I. Belyaeva ;
A. A. Galuza ;
A. A. Savchenko ;
K. A. Slatin .
Bulletin of the Russian Academy of Sciences: Physics, 2011, 75 (5)
[3]   Optical characteristics of recrystallized tungsten mirrors exposed to low-energy, high flux D plasmas [J].
Belyaeva, A. I. ;
Alimov, V. Kh. ;
Galuza, A. A. ;
Isobe, K. ;
Konovalov, V. G. ;
Ryzhkov, I. V. ;
Savchenko, A. A. ;
Slatin, K. A. ;
Voitsenya, V. S. ;
Yarnanishi, T. .
JOURNAL OF NUCLEAR MATERIALS, 2011, 413 (01) :5-10
[4]   Hydrogen ion bombardment damage in stainless steel mirrors [J].
Belyaeva, AI ;
Bardamid, AF ;
Davis, JW ;
Haasz, AA ;
Konovalov, VG ;
Kudlenko, AD ;
Poon, M ;
Slatin, KA ;
Voitsenya, VS .
JOURNAL OF NUCLEAR MATERIALS, 2005, 345 (2-3) :101-108
[5]  
BELYAEVA AI, 2015, TELECOMM RADIO ENG, V75, P171
[6]  
BELYAEVA AI, 2012, B RUSSIAN ACAD SCI P, V76, P854
[7]  
Fujiwara H., 2009, SPECTROSCOPIC ELLIPS
[8]   A system for the automation of a cryogenic spectral ellipsometer [J].
Galuza, AA ;
Kudlenko, AD ;
Slatin, KA ;
Belyaeva, AI ;
Smirnov, MM .
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2003, 46 (04) :477-479
[9]  
Goldsmith P.F, 1998, IEEE PRESS SERIES RF
[10]   Methods of terahertz-subterahertz BWO spectroscopy of conducting materials [J].
Gorshunov, B. P. ;
Volkov, A. A. ;
Prokhorov, A. S. ;
Spektor, I. E. .
PHYSICS OF THE SOLID STATE, 2008, 50 (11) :2001-2012