Co-deposition of deuterium with silicon doped carbon

被引:9
作者
Balden, M [1 ]
Mayer, M [1 ]
Roth, J [1 ]
机构
[1] EURATOM Assoc, Max Planck Inst Plasmaphys, D-85748 Garching, Germany
关键词
co-deposition; deuterium inventory; ion beam analysis; a-Si : C : H; thin film composition;
D O I
10.1016/S0022-3115(98)00583-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The co-deposition of deuterium with silicon doped carbon for silicon concentrations between 0-100 at.% in the temperature range from room temperature to 1000 K has been investigated. The eroded material from various different targets was caught on collectors together with the reflected D to build up the co-deposited layers, which were analysed with MeV ion beam techniques. The amount of trapped D per re-deposited target atom depends weakly on the Si concentration. The maximum of about 0.7 D/(Si + C) was found at Si/C approximate to 1. For pure C and pure Si the D concentration is about 0.45 and 0.5 D atoms per re-deposited target atom at room temperature, respectively. For increasing deposition temperature the D concentration does not decrease significantly until about 600 It. At about 1000 K the D concentration for pure carbon layers is still about 30% of the concentration at room temperature. Also, co-deposited layers of stainless steel and of titanium-carbon mixtures were investigated. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:440 / 445
页数:6
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