Internal reflection ellipsometry in air and water ambient

被引：3

作者：

Otsuki, Soichi ^{[1
]}

Ishikawa, Mitsuru ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Hlth Res Inst, Kagawa 7610395, Japan

来源：

OPTICS LETTERS | 2010年 / 35卷 / 24期

关键词：

THICKNESS MEASUREMENTS; REFRACTIVE-INDEX; ADSORPTION; LAYERS;

D O I：

10.1364/OL.35.004226

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We measured a multilayer sample in air and water ambient below the critical angle of incidence based on internal reflection ellipsometry (IRE). Measurements with varying incident angle and varying wavelength both provided values by the fitting for refractive indices and thicknesses of layers consistent with design or theoretical ones. This verified that IRE is useful in measurement and analysis of thin films on transparent substrates and especially effective to study thin films at transparent substrate-liquid interfaces. (C) 2010 Optical Society of America

引用

页码：4226 / 4228

页数：3

共 50 条

[1] SURFACTANT CHARACTERIZATION AT AN AIR WATER INTERFACE BY DIRECT REFLECTION ELLIPSOMETRY
KRULL, UJ
HUM, A
VANDENBERG, ET
ANALYTICA CHIMICA ACTA, 1987, 202 : 215 - 221
[2] INTERNAL REFLECTION ELLIPSOMETRY FOR METAL DEPOSITS
CHAN, EC
MARTON, JP
JOURNAL OF APPLIED PHYSICS, 1972, 43 (10) : 4027 - &
[3] Total internal reflection ellipsometry of periodic structures
Pistora, J
Vlcek, J
Hlubina, P
Foldyna, M
Zivotsky, O
PHOTONICS, DEVICES, AND SYSTEMS III, 2006, 6180
[4] Total internal reflection ellipsometry: principles and applications
Arwin, H
Poksinski, M
Johansen, K
APPLIED OPTICS, 2004, 43 (15) : 3028 - 3036
[5] INTERNAL-REFLECTION ELLIPSOMETRY AND SCATTERING OF INTERFACES
AYOUB, GT
BASHARA, NM
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (10) : 1430 - 1430
[6] Potential Modulation on Total Internal Reflection Ellipsometry
Liu, Wei
Niu, Yu
Viana, A. S.
Correia, Jorge P.
Jin, Gang
ANALYTICAL CHEMISTRY, 2016, 88 (06) : 3211 - 3217
[7] Protein monolayers monitored by internal reflection ellipsometry
Poksinski, M
Arwin, H
THIN SOLID FILMS, 2004, 455 : 716 - 721
[8] Biosensor with total internal reflection imaging ellipsometry
Chen, Y-Y.
Wang, Z-H.
Meng, Y-H.
Jin, G.
INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2007, 4 (1-2) : 171 - 178
[9] Monolayer film analysis by total internal reflection ellipsometry
Vaicikauskas, V.
Balevicius, Z.
LITHUANIAN JOURNAL OF PHYSICS, 2007, 47 (01): : 81 - 85
[10] INTERNAL REFLECTION SPECTROSCOPY AND ELLIPSOMETRY FOR STUDY OF THIN FILMS
HARRICK, NJ
BECKMANN, KH
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (03) : C61 - &

← 1 2 3 4 5 →