Silicon photonics co-integrated with silicon nitride for optical phased arrays

被引：11

作者：

Marinins, Aleksandrs ^{[1
]}

Dwivedi, Sarvagya P. ^{[1
]}

Kjellman, Jon O. ^{[1
]}

Kerman, Sarp ^{[1
]}

David, Tangla ^{[1
]}

Figeys, Bruno ^{[1
]}

Jansen, Roelof ^{[1
]}

Tezcan, Deniz S. ^{[1
]}

Rottenberg, Xavier ^{[1
]}

Soussan, Philippe ^{[1
]}

机构：

[1] IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2020年 / 59卷 / SG期

关键词：

WAVE-GUIDES;

D O I：

10.7567/1347-4065/ab5b6d

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In the current work we present Si and SiN combined photonic built-up for optical phased arrays (OPAs) and other large area photonic integrated circuits. We report low-loss co-integrated SIN waveguides and nearly lossless vertical transitions between Si and SiN layers, as well as efficient Si thermo-optical phase shifter module. OPA consisting of 64 optical antennas forming highly collimated beam with 0.4 degrees x 0.47 degrees divergence is, reported. By changing input wavelength, solid-state beam steering of 0 degrees-10 degrees is achieved. (C) 2020 The Japan Society of Applied Physics

引用

页数：3

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