Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

被引：24
作者：
Chung, Koo-Hyun
Lee, Yong-Ha
Kim, Young-Tae
Kim, Dae-Eun [1 ]
Yoo, Jingyoo
Hong, Seungbum
机构：
[1] Yonsei Univ, Sch Mech Engn, Seoul 120749, South Korea
[2] Samsung Elect, Storage Syst Div, Suwon 443742, South Korea
[3] Samsung Adv Inst Technol, NanoDevices Lab, Yongin 449712, South Korea
来源：
SURFACE & COATINGS TECHNOLOGY | 2007年 / 201卷 / 18期
关键词：
atomic force microscope (AFM); friction; PZT film; wear;
D O I：
10.1016/j.surfcoat.2007.03.044
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this work, the nano-scale tribological characteristics of PZT thin films (Pb(ZrxTi1-x)03: PZT) with various Zr/Ti ratios were investigated using an Atomic Force Microscope (AFM). The PZT thin films deposited by the sol-gel method were characterized by using an AFM, X-Ray Diffraction (XRD), and a nano-indentation technique. From the experimental results, the friction coefficient of the PZT thin film was found to be about 0.1-0.2 under a 0.1-10 mu N normal force. It was determined that the wear rate of the PZT thin film was in the order of 10(-8) mm3/N(.)cycle. Also, it was observed that the crystalline structure of the PZT was amorphized due to mechanical stress. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：7983 / 7991
页数：9
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