Structural characterization of TiO2 films grown on LaAlO3 and SrTiO3 substrates using reactive molecular beam epitaxy

被引：36

作者：

Weng, X. ^{[2
,3
]}

Fisher, P. ^{[4
]}

Skowronski, M. ^{[4
]}

Salvador, P. A. ^{[4
]}

Maksimovc, O. ^{[1
]}

机构：

[1] Penn State Univ, Electro Opt Ctr, Freeport, PA 16229 USA

[2] Penn State Univ, Dept Mat Sci, University Pk, PA 16802 USA

[3] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA

[4] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA

来源：

JOURNAL OF CRYSTAL GROWTH | 2008年 / 310卷 / 03期

关键词：

electron energy loss spectrometry; transmission electron microscopy; molecular beam epitaxy; TiO2;

D O I：

10.1016/j.jcrysgro.2007.10.084

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We have studied the microstructure of TiO2 films, grown by reactive molecular beam epitaxy (MBE) on LaAlO3 (LAO) and SrTiO3 (STO) substrates, using a combination of transmission electron microscopy (TEM) and electron energy loss spectrometry (EELS). TiO2 films grew epitaxially in the anatase polymorph and exhibited the crystallographic orientation relation of (001)(010)(TiO2)parallel to(001)(010)(substrate). High-resolution TEM and EELS studies indicated the presence of a cubic TiOx phase at the TiO2/STO interface. Interfacial TiOx phases were eliminated and a sharp TiO2/STO interface was achieved by growing the TiO2 film on a heteroepitaxial STO buffer layer. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：545 / 550

页数：6

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