Optical multichannel analyzer constructed with 4400 system for glass surface and thin film measurement

被引:0
作者
Gu, Zhengtian [1 ]
Ye, Ren [2 ]
Wang, Zhenyuan [1 ]
Liang, Pelhui [2 ]
机构
[1] Shanghai Univ Sci & Technol, Coll Sci, POB 249 516 Jun Gong Rd, Shanghai 200093, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
来源
3RD INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, PARTS 1-3 | 2007年 / 6723卷
关键词
photodiode array; optical multichannel analyzer; glass surface; thin film; optical parameters;
D O I
10.1117/12.783187
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new scheme of optical multichannel analyzer is developed based on Model 4400 Signal Detection and Analysis System. The scheme consists of an optical signal source, a photodiode array and Model 4400 Signal Detection and Analysis System. The signal source provides varies light intensity distribution from optical system. The photodiode array transforms spatial distribution of light intensity into time dependence of electric current intensity. Model 4400 Signal Detection and Analysis System carries out signal processing and analysis through boxcar, keyboard control and advanced microprocessor. With this scheme, the spatial distribution of laser light-intensity was described and the relevant parameters such as beam waist radius of Gaussian distribution were obtained. Further, the optical parameters of the plane glass surface and PMTES thin films were obtained by p-polarized reflectance method. By measuring the angle distribution of reflectance ratio and fitting the results with theoretical data, the optical parameters can be obtained easily. Experimental results indicate that the refractive index and extinction coefficient of glass surface layers decrease exponentially with the thickness of glass layer. Also the optical parameters of PMTES films with the presented scheme have been measured, and the experimental results coincide well with theoretical simulation only if the glass surface layers are considered. Due to the introduction of digital averaging technique in 4400 System, the sampling signals with higher signal-to-noise ratio are acquired, and the presented scheme has higher measurement precision, which is very suitable to temporal-spatial transform and analysis of optical field and precise measurement of surface and film system.
引用
收藏
页数:7
相关论文
共 7 条
[1]  
Afanaseva A. G., 1990, Optics and Spectroscopy, V69, P679
[2]  
CHEN JG, 1989, DETECTION WEAK SIGNA
[3]   A novel sensitive scheme for determining the optical parameters of thin films by p-polarized reflectance [J].
Gu, ZT ;
Liang, PH ;
Liu, XL ;
Zhang, WQ .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2000, 11 (04) :N56-N61
[4]   DETERMINATION OF THE OPTICAL FUNCTIONS OF TRANSPARENT GLASSES BY USING SPECTROSCOPIC ELLIPSOMETRY [J].
JELLISON, GE ;
SALES, BC .
APPLIED OPTICS, 1991, 30 (30) :4310-4315
[5]  
LING ZD, 2000, OPT LETT, V20, P810
[6]   SELF-SCANNED PHOTO-DIODE ARRAY - A MULTICHANNEL SPECTROMETRIC DETECTOR [J].
TALMI, Y ;
SIMPSON, RW .
APPLIED OPTICS, 1980, 19 (09) :1401-1414
[7]  
ZHOU Bingkun, 2000, PRINCIPLE LASER