The pH-dependant attachment of ceria nanoparticles to silica using surface analytical techniques

被引:27
作者
Dawkins, K. [1 ]
Rudyk, B. W. [1 ]
Xu, Z. [1 ]
Cadien, K. [1 ]
机构
[1] Univ Alberta, Dept Chem & Mat Engn, Edmonton, AB T6G 2V4, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
Adhesion; Si; Ce; X-ray photoelectron spectroscopy; Chemical mechanical polishing; X-RAY PHOTOELECTRON; CE 3D XPS; CHEMICAL-PROCESSES; THIN-FILMS; OXIDE; REMOVAL; PARTICLES; STABILITY; SLURRIES; CMP;
D O I
10.1016/j.apsusc.2015.03.170
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The adhesion and removal of ceria particles to a silica surface was investigated with the use of X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and auger electron spectroscopy (AES) measurements. A model is presented based on electrophoretic mobility measurements of ceria slurry and silica particles at different pH's. XPS results show that at acidic pH values, ceria is present on silica surfaces, but at alkaline pH values, far less ceria is present, or no ceria is present in the extreme case. SEM results corroborated the XPS results showing uniform distribution of ceria particles on silica surface at pH 6 while a clean silica surface is observed at pH 12. However, SEM images show agglomeration of ceria particles occurring at the isoelectric point of ceria at similar to pH 9.6. High resolution Ce 3d XPS analysis indicates that ceria present on the surface is composed similar to 31% Ce(III) and similar to 69% Ce(IV). AES mapping done at specific points on the silica surface validated both XPS and SEM results. Based on XPS, SEM and AES analyses, it is clear that an alkaline pH is necessary to minimize particulate contamination of silica surface by ceria. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:249 / 255
页数:7
相关论文
共 27 条
  • [1] Effect of pH on ceria-silica interactions during chemical mechanical polishing
    Abiade, JT
    Choi, W
    Singh, RK
    [J]. JOURNAL OF MATERIALS RESEARCH, 2005, 20 (05) : 1139 - 1145
  • [2] XPS studies on the interaction of CeO2 with silicon in magnetron sputtered CeO2 thin films on Si and Si3N4 substrates
    Anandan, C.
    Bera, Parthasarathi
    [J]. APPLIED SURFACE SCIENCE, 2013, 283 : 297 - 303
  • [3] Ce 3d XPS investigation of cerium oxides and mixed cerium oxide (CexTiyOz)
    Beche, Eric
    Charvin, Patrice
    Perarnau, Danielle
    Abanades, Stephane
    Flamant, Gilles
    [J]. SURFACE AND INTERFACE ANALYSIS, 2008, 40 (3-4) : 264 - 267
  • [4] SATELLITE STRUCTURE IN X-RAY PHOTOELECTRON-SPECTRA OF SOME BINARY AND MIXED OXIDES OF LANTHANUM AND CERIUM
    BURROUGHS, P
    HAMNETT, A
    ORCHARD, AF
    THORNTON, G
    [J]. JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 1976, (17): : 1686 - 1698
  • [5] Chandrasekaran N, 2004, MATER RES SOC SYMP P, V816, P257
  • [6] CHEMICAL PROCESSES IN GLASS POLISHING
    COOK, LM
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 120 (1-3) : 152 - 171
  • [7] FAIRLEY N, 2003, CASAXPS VERSION 2 3
  • [8] Adhesion and removal of silica and ceria particles on the wafer surfaces in STI and poly SiCMP
    Hong, Yi Koan
    Kang, Young-Jae
    Park, Jin-Goo
    Han, Sang-Yeob
    Yun, Seong-Kyu
    Yoon, Bo-Un
    Hong, Chang-Ki
    [J]. ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES VIII, 2008, 134 : 159 - +
  • [9] MANY-BODY EFFECTS IN CORE-LEVEL SPECTROSCOPY OF RARE-EARTH COMPOUNDS
    KOTANI, A
    JO, T
    PARLEBAS, JC
    [J]. ADVANCES IN PHYSICS, 1988, 37 (01) : 37 - 85
  • [10] Ce 3d XPS study of composite CexMn1-xO2-y wet oxidation catalysts
    Larachi, F
    Pierre, J
    Adnot, A
    Bernis, A
    [J]. APPLIED SURFACE SCIENCE, 2002, 195 (1-4) : 236 - 250