Multifunctional high-reflective and antireflective layer systems with easy-to-clean properties

被引：21

作者：

Gloess, D. ^{[1
]}

Frach, P. ^{[1
]}

Gottfried, C. ^{[1
]}

Klinkenberg, S. ^{[1
]}

Liebig, J. -S. ^{[1
]}

Hentsch, W. ^{[2
]}

Liepack, H. ^{[2
]}

Krug, M. ^{[2
]}

机构：

[1] Fraunhofer Inst Elektronenstrahl & Plasmatech FEP, D-01277 Dresden, Germany

[2] FHR Anlagenbau GmbH, D-01458 Ottendorf Okrilla, Germany

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 14期

关键词：

titanium dioxide; photocatalysis; pulse magnetron sputtering; antireflective coating; optical coating;

D O I：

10.1016/j.tsf.2007.05.097

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High-reflective (HR) and even more antireflective (AR) layer systems are in use for widespread applications. Multifunctional layer systems providing high optical functionality with an easy-to-clean or a self-cleaning behaviour would be preferable for many applications to avoid soiling of the surface. In this paper, the feasibility of fabrication by highly productive pulse magnetron sputtering, in an in-line coating plant is investigated. Easy-to-clean properties are achieved by a top layer of photocatalytic and photoinduced hydrophilic TiO2. Multifunctional HR layer systems were successfully deposited on glass and polyethylene terephthalate (PET) substrates at a low deposition temperature of 150 degrees C, demonstrating the possibility of coating certain polymer materials. Double-sided multifunctional AR layer systems with a single-sided photoinduced hydrophilic TiO2 top coating have a resulting reflectivity of about 3% and transmittance of about 97% in the visible range of light. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：4487 / 4489

页数：3

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