Floating zone growth of silicon in magnetic fields:: IV.: Rotating magnetic fields

被引:53
作者
Dold, P
Cröll, A
Lichtensteiger, M
Kaiser, T
Benz, KW
机构
[1] Univ Freiburg, Inst Kristallog, D-79104 Freiburg, Germany
[2] Tech Univ Freiberg, Inst NE Metalle & Reinststoffe, D-09599 Freiburg, Germany
[3] NASA, MSFC, USRA, Huntsville, AL 35812 USA
关键词
computer simulation; rotating magnetic fields; segregation; thermocapillary convection; floating zone technique; semiconducting silicon;
D O I
10.1016/S0022-0248(01)01491-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Transverse rotating magnetic fields (B-max = 7.5 mT, f(rot) = 50 Hz) were applied to the floating zone growth of doped silicon. Non-periodic dopant fluctuations caused by time-dependent thermocapillary convection were considerably reduced by the rotating field. The radial segregation profiles (measured by a spreading resistance probe) became more homogeneous and more symmetric. The transition from a regime dominated by time-dependent thermocapillary convection to a flow state characterized by the rotating magnetic field was determined. This threshold depends on the height of the melt as well as the melt diameter (crystals between 8 and 14 mm have been investigated) and the efficiency of the applied field increases with larger melt zones. For a melt of 14 mm in diameter and an aspect ratio of I it is in the range of 2.5-3.75 mT/50 Hz (corresponding to a Taylor number of Ta = 9.3 x 10(3) -2.1 x 10(-4)). The change from a time-dependent 3D-flow without field to a quasi-axisymmetric 2D-flow with the magnetic field is corroborated by numerical simulations of the flow field: the thermocapillary driven irregular flow rolls are transformed to a nearly axisymmetric flow with high azimuthal flow velocities but reduced axial and radial components. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:95 / 106
页数:12
相关论文
共 33 条
[1]  
BIRAT JP, 1983, IRONMAK STEELMAK, V10, P269
[2]   Floating-zone growth of silicon in magnetic fields - II. Strong static axial fields [J].
Croll, A ;
Szofran, FR ;
Dold, P ;
Benz, KW ;
Lehoczky, SL .
JOURNAL OF CRYSTAL GROWTH, 1998, 183 (04) :554-563
[3]   The influence of static and rotating magnetic fields on heat and mass transfer in silicon floating zones [J].
Cröll, A ;
Dold, P ;
Kaiser, T ;
Szofran, FR ;
Benz, KW .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (06) :2270-2275
[4]  
Croll A., 1991, Microgravity Sci. Technol, V3, P204
[5]  
DAHLBERG E, 1972, AE447 AB AT
[7]   THE IMPORTANCE OF SECONDARY FLOW IN THE ROTARY ELECTROMAGNETIC STIRRING OF STEEL DURING CONTINUOUS-CASTING [J].
DAVIDSON, PA ;
BOYSAN, F .
APPLIED SCIENTIFIC RESEARCH, 1987, 44 (1-2) :241-259
[8]   Modification of fluid flow and heat transport in vertical Bridgman configurations by rotating magnetic fields [J].
Dold, P ;
Benz, KW .
CRYSTAL RESEARCH AND TECHNOLOGY, 1997, 32 (01) :51-60
[9]  
Dold P, 1999, PROG CRYST GROWTH CH, V38, P7, DOI 10.1016/S0960-8974(99)00007-8
[10]  
ENGELMAN MS, 1998, FIDAP 7 6