A high precision quartz crystal MEMS accelerometer based 2 axis inclinometer

被引：0

作者：

Levy, R. ^{[1
]}

Bourgeteau, B. ^{[1
]}

Guerard, J. ^{[1
]}

Lavenus, P. ^{[1
]}

机构：

[1] Off Natl Etud & Rech Aerosp, Chatillon, France

来源：

2016 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2016年

关键词：

inclinometer; MEMS; resonator;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The development of a high resolution MEMS inclinometer is presented. First the design of the inclinometer based on the integration of three quartz vibrating beam accelerometers is shown, then experimental results are shown concerning the resolution. This new inclinometer will enable new applications such as guidance of micro UAVS or structural health monitoring.

引用

页数：3

共 8 条

[1]

Billat S., 2001, MICR SYST 2001 MEMS

[2] Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout [J].