Additive and subtractive manufacturing of gold micro/nanostructures by using laser trapping and ablation

被引:5
作者
Cao, Hong-Zhon [1 ]
Cao, Liang-Chen [2 ]
Fang, Gan [2 ]
Zhaoc, Yuan-Yuan [3 ]
Xud, Guo-Juan [4 ]
Chen, Zhong-Yun [5 ]
Duan, Xuan-Ming [3 ]
机构
[1] Qufu Normal Univ, Laser Inst, Shandong Prov Key Lab Laser Polarizat & Informat, Qufu 273165, Peoples R China
[2] Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Addit Mfg Technol & Syst, Chongqing 400714, Peoples R China
[3] Jinan Univ, Inst Photon Technol, Guangdong Prov Key Lab Opt Fiber Sensing & Commun, Guangzhou 510632, Peoples R China
[4] Qufu Normal Univ, Sch Cyber Sci & Engn, Qufu 273165, Shandong, Peoples R China
[5] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Key Lab Airborne Opt Imaging & Measurement, Changchun 130033, Peoples R China
基金
中国国家自然科学基金;
关键词
Hybrid manufacturing technology; Gold micro; nanostructures; Laser trapping; Laser ablation; FABRICATION;
D O I
10.1016/j.optlaseng.2022.106959
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Gold micro/nanostructures were additively manufactured by using laser trapping of gold nanoparticles in an aqueous solution. Gold wire composed of sintered compacted nanoparticles with spatial resolution of 470 nm was fabricated. Influence factors for wire fabrications were also studied systematically. In order to investigate the fabrication capacity of this technology for three-dimensional structures, several microstructures were fabricated. A new additive and subtractive hybrid manufacturing technology by using laser trapping and ablation was proposed and realized to further improve the spatial resolution of the fabricated structures. A gold microring with line width of 37 nm was fabricated through precisely controlling fabrication parameters. This hybrid manufacturing technology has great application prospects in the fabrication of high spatial resolution nanostructures.
引用
收藏
页数:5
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