External fibre Fabry-Perot acoustic sensor based on a photonic-crystal mirror

被引：77

作者：

Kilic, Onur ^{[1
]}

Digonnet, Michel ^{[1
]}

Kino, Gordon ^{[1
]}

Solgaard, Olav ^{[1
]}

机构：

[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2007年 / 18卷 / 10期

关键词：

acoustic sensor; optical microphone; fibre Fabry-Perot interferometer; photonic-crystal mirror;

D O I：

10.1088/0957-0233/18/10/S01

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrate an acoustic sensor based on a Fabry - Perot interferometer formed by a single- mode fibre and an external silicon photonic- crystal mirror. Measurements in air indicate that this sensor has a relatively uniform frequency response up to at least 50 kHz, and detects pressures as low as 18 mu Pa Hz(-1/2). This limit is four orders of magnitude lower than in similar types of acoustic fibre sensors. The sensor response agrees with mechanical calculations to within a few dB. We predict that this sensor has the potential to detect pressures as low as 600 nPa Hz(-1/2), corresponding to the ambient thermal noise level in air at room temperature.

引用

页码：3049 / 3054

页数：6

共 13 条

[1]

[Anonymous], 1958, Elementary Statistical Physics

[2] Miniature, high performance, low-cost fiber optic microphone [J].

Bucaro, JA ;

Lagakos, N ;

Houston, BH ;

Jarzynski, J ;

Zalalutdinov, M .

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2005, 118 (03) :1406-1413

[3] FIBEROPTIC HYDROPHONE [J].

BUCARO, JA ;

DARDY, HD ;

CAROME, EF .

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1977, 62 (05) :1302-1304

[4]

CHAU HL, 1987, IEEE T ELECTRON DEV, V34, P850, DOI 10.1109/T-ED.1987.23006

[5] FIBEROPTIC DETECTION OF SOUND [J].

COLE, JH ;

JOHNSON, RL ;

BHUTA, PG .

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1977, 62 (05) :1136-1138

[6] Analysis of guided resonances in photonic crystal slabs [J].

Fan, SH ;

Joannopoulos, JD .

PHYSICAL REVIEW B, 2002, 65 (23) :1-8

[7] MECHANICAL-THERMAL NOISE IN MICROMACHINED ACOUSTIC AND VIBRATION SENSORS [J].

GABRIELSON, TB .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (05) :903-909

[8] Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications [J].

Gander, MJ ;

MacPherson, WN ;

Barton, JS ;

Reuben, RL ;

Jones, JDC ;

Stevens, R ;

Chana, KS ;

Anderson, SJ ;

Jones, TV .

IEEE SENSORS JOURNAL, 2003, 3 (01) :102-107

[9] Photonic crystal slabs demonstrating strong broadband suppression of transmission in the presence of disorders [J].

Kilic, O ;

Kim, S ;

Suh, W ;

Peter, YA ;

Sudbo, AS ;

Yanik, MF ;

Fan, SH ;

Solgaard, O .

OPTICS LETTERS, 2004, 29 (23) :2782-2784

[10]

KILIC O, 2007, UNPUB OPT EXPRESS

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