High laser power resistance phase-only spatial light modulator for laser processing cyber-physical system

被引：2
作者：
Takiguchi, Yu [1 ]
Tanaka, Hiroshi [1 ]
Watanabe, Tsubasa [1 ]
Asaine, Hirokazu [1 ]
Mukozaka, Naohisa [1 ]
Ohtake, Yoshiyuki [1 ]
Toyoda, Haruyoshi [1 ]
机构：
[1] Hamamatsu Photon KK, Hamakita Ku, 5000 Hirakuchi, Hamamatsu, Shizuoka 4348601, Japan
来源：
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXVI | 2021年 / 11673卷
基金：
日本科学技术振兴机构;
关键词：
Spatial light modulator; Holographic laser processing; Ultrafast laser processing; Digital photonics; Additive manufacturing;
D O I：
10.1117/12.2577330
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this study, we developed a liquid-crystal spatial light modulator with high laser power capacity for industrial ultrafast pulse lasers to demonstrate innovative manufacturing and fabrication techniques using a cyber-physical system. The incident phase performance characteristic of this device was obtained with a 60 W, 1035 nm ultrafast laser. This research work will help to accelerate the use of liquid crystal spatial light modulators for high-precision laser processing of resistant materials and high-throughput for additive manufacturing.
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页数：7
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