Electrical Characterization of Novel PMNT Thin-films

被引：0

作者：

Chen, Wenbin ^{[1
]}

McCarthy, Kevin G. ^{[2
]}

Copuroglu, Mehmet ^{[1
]}

O'Brien, Shane ^{[1
]}

Winfield, Richard ^{[1
]}

Mathewson, Alan ^{[1
]}

机构：

[1] Univ Coll Cork, Tyndall Natl Inst, Cork, Ireland

[2] Univ Coll Cork, Dept Elect & Elect Engn, Cork, Ireland

来源：

2010 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, 23RD IEEE ICMTS CONFERENCE PROCEEDINGS | 2010年

关键词：

High-kappa; thin-film; PMNT; dielectric constant; dielectric loss tangent;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the systematic investigation by electrical characterization of PMNT (lead magnesium niobate - lead titanate, Pb(Mg0.33Nb0.67)(0.65)Ti0.35O3) thin-films with different fabrication parameters. The PMNT thin-films are processed under different conditions including annealing at various temperatures. Capacitance-voltage (C-V), current-voltage (I-V), capacitance-frequency (C-F), dissipation factor-frequency (D-F) and complex impedance-frequency (Z-F) measurements are presented.

引用

页码：98 / 101

页数：4

共 8 条

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