Chemical sensor based on surface acoustic wave resonator using Langmuir-Blodgett film

被引：23

作者：

Nomura, T ^{[1
]}

Takebayashi, M ^{[1
]}

Saitoh, A ^{[1
]}

机构：

[1] Shibaura Inst Technol, Dept Elect Commun, Tokyo 108, Japan

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1998年 / 45卷 / 05期

关键词：

D O I：

10.1109/58.726452

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A one-port surface acoustic wave (SAW) resonators incorporating Langmuir-Blodgett (LB) films has been investigated. SAW sensors are one potential applications of SAW devices. Most of the work reported on SAW sensor concerns delay lines. In this paper we characterize the mass loading effects of one-port resonators by depositing successive monolayers of LB films onto the surface. A 90 MHz SAW gas-phase sensor has been fabricated on an ST cut quartz substrate, and one-port resonator configurations have been used as the sensing element. Ultra thin monolayers of arachidic acid and arachidic acid ethyl ester have been deposited using the LB method. The resonant frequencies and the Q values have been measured as sensor response. Experimental results show that the Q values and the resonant frequencies of the one-port SAW resonator vary with film mass loading on the SAW device surface.

引用

页码：1261 / 1265

页数：5

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