3D molding of hierarchical micro- and nanostructures

被引:17
|
作者
Farshchian, Bahador [1 ,2 ]
Hurst, Steven M. [1 ,2 ]
Lee, Jaejong [3 ]
Park, Sunggook [1 ,2 ]
机构
[1] Louisiana State Univ, Dept Mech Engn, Baton Rouge, LA 70803 USA
[2] Louisiana State Univ, Ctr Biomodular Multiscale Syst, Baton Rouge, LA 70803 USA
[3] Korea Inst Machinery & Mat, Nanomech Syst Res Div, Taejon 305343, South Korea
基金
美国国家科学基金会;
关键词
ULTRAHYDROPHOBIC SURFACES; SUBMICRON PATTERNS; SOFT MOLD; FABRICATION; LITHOGRAPHY; PRESSURE;
D O I
10.1088/0960-1317/21/3/035016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We show a simple and effective process to produce large area, hierarchical 3D micro- and nanostructures via a modified hot embossing process, which we name 3D molding. The 3D molding process takes advantage of both a hard mold from hot embossing and the flexibility of a thin, elastomeric intermediate stamp from soft lithography. Using this method, we have demonstrated the formation of various micro- and nanostructures in non-planar microscale structures including microchannels and step surfaces. The ability to produce micro/nanopatterns within microchannels will have potential applications in bioanalytic micro/nanofluidic devices by allowing for the manipulation of a broader range of surface properties and thus control over surface interactions with biomaterials flowing through the microfluidic channels.
引用
收藏
页数:8
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