A physics-based electromigration reliability model for interconnects lifetime prediction

被引:0
|
作者
Cai, Linlin [1 ]
Chen, Wangyong [1 ]
Kang, Jinfeng [1 ]
Du, Gang [1 ]
Liu, Xiaoyan [1 ]
Zhang, Xing [1 ]
机构
[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1007/s11432-020-3140-4
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页数:2
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