Microstructure, wear and oxidation resistance of CrWN glass molding coatings synthesized by plasma enhanced magnetron sputtering

被引:32
作者
Huang, Xinfang [1 ]
Xie, Zhiwen [1 ]
Li, Kangshen [2 ]
Chen, Qiang [3 ]
Gong, Feng [2 ]
Chen, Yongjun [1 ,4 ]
Feng, Bo [1 ]
Hu, Suying [1 ]
Chen, Yah [1 ]
Han, Bing [1 ]
Wu, Di [1 ]
机构
[1] Univ Sci & Technol Liaoning, Liaoning Key Lab Complex Workpiece Surface Specia, Anshan 114051, Peoples R China
[2] Shenzhen Univ, Shenzhen Key Lab Adv Mfg Technol Mold & Die, Shenzhen 518060, Peoples R China
[3] Southwest Technol & Engn Res Inst, Chongqing 400039, Peoples R China
[4] Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian, Peoples R China
关键词
Cr-W-N coatings; Microstructure; Wear resistance; Oxidation resistance; Plasma enhanced magnetron sputtering; RAY PHOTOELECTRON-SPECTROSCOPY; TUNGSTEN NITRIDE FILMS; DIAMOND-LIKE CARBON; TRIBOLOGICAL PROPERTIES; MECHANICAL-PROPERTIES; HIGH-TEMPERATURE; CRN FILMS; W-N; DEPOSITION; STICKING;
D O I
10.1016/j.vacuum.2020.109206
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
CrWN glass molding coatings with different W contents were synthesized by plasma enhanced magnetron sputtering (PEMS). The microstructure, mechanical, wear resistance, and anti-oxidation properties of as-deposited coatings were investigated using various techniques and tests. The results showed that the as-deposited coatings exhibited typical columnar growth structure, consisting of layered CrN and W2N, and showed increased lattice expansion and hardness enhancement with increasing W content. Whereas the coating with high H/E value showed better toughness to resist fatigue deformation and fracture, which eventually resulted in excellent wear performance and low wear rate of 0.89 x 10(-6) mm(3)/Nm. Annealing revealed that the as-deposited coating with low W content showed a slight increase in thickness and Ra value because of high volume fraction of Cr2O3 phase, which effectively delayed the oxidation reaction and suppressed the expansion of WO3 phases. With the increase in W content, the rising volume fraction of WO3 phases weakened the stabilized effects of Cr2O3 phases and eventually led to a constant increase in thickness and Ra value of the annealed coating. The mold tests confirmed that the CrWN coating showed a stable structure and excellent chemical inertness and anti-sticking performance, making it a potential coating for glass molding processes.
引用
收藏
页数:12
相关论文
共 43 条
[1]   Temperature Dependence of Copper Diffusion in Different Thickness Amorphous Tungsten/Tungsten Nitride Layer [J].
Asgary, Somayeh ;
Hantehzadeh, Mohammad Reza ;
Ghoranneviss, Mahmood .
PHYSICS OF METALS AND METALLOGRAPHY, 2017, 118 (11) :1127-1135
[2]   Reactive sputter deposition of tungsten nitride thin films [J].
Baker, CC ;
Shah, SI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (05) :1699-1703
[3]   Development of a ta-C diamond-like carbon (DLC) coating by magnetron sputtering for use in precision glass molding [J].
Bernhardt, F. ;
Georgiadis, K. ;
Dolle, L. ;
Dambon, O. ;
Klocke, F. .
MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK, 2013, 44 (08) :661-666
[4]   Mechanical properties and oxidation resistance of reactively sputtered Ta1 - xZrxNy thin films [J].
Chang, Li-Chun ;
Chang, Ching-Yen ;
Chen, Yung-I .
SURFACE & COATINGS TECHNOLOGY, 2015, 280 :27-36
[5]   High temperature oxidation resistance of multicomponent Cr-Ti-Al-Si-N coatings [J].
Chang, Yin-Yu ;
Hsiao, Chia-Yuan .
SURFACE & COATINGS TECHNOLOGY, 2009, 204 (6-7) :992-996
[6]   Chemical inertness of Cr-W-N coatings in glass molding [J].
Chen, Yung-I ;
Cheng, Yu-Ru ;
Chang, Li-Chun ;
Lee, Jyh-Wei .
THIN SOLID FILMS, 2015, 593 :102-109
[7]   Precision compression molding of glass microlenses and microlens arrays - an experimental study [J].
Firestone, GC ;
Yi, AY .
APPLIED OPTICS, 2005, 44 (29) :6115-6122
[8]   Investigation of the effects of process parameters on the glass-to-mold sticking force during precision glass molding [J].
Fischbach, Kyle D. ;
Georgiadis, Kyriakos ;
Wang, Fei ;
Dambon, O. ;
Klocke, F. ;
Chen, Yang ;
Yi, Allen Y. .
SURFACE & COATINGS TECHNOLOGY, 2010, 205 (02) :312-319
[9]   X-ray photoelectron spectroscopy: Towards reliable binding energy referencing [J].
Greczynski, G. ;
Hultman, L. .
PROGRESS IN MATERIALS SCIENCE, 2020, 107
[10]   Reliable determination of chemical state in x-ray photoelectron spectroscopy based on sample-work-function referencing to adventitious carbon: Resolving the myth of apparent constant binding energy of the C 1s peak [J].
Greczynski, G. ;
Hultman, L. .
APPLIED SURFACE SCIENCE, 2018, 451 :99-103