A MEMS ACCELEROMETER WITH AN AUTO-TUNING SYSTEM BASED ON AN ELECTROSTATIC ANTI-SPRING

被引：3

作者：

Wang, Chen ^{[1
,2
,3
]}

Wang, Yuan ^{[4
,5
]}

Fang, Weidong ^{[1
]}

Song, Xiaoxiao ^{[4
,5
]}

Quan, Aojie ^{[3
]}

Gidts, Michiel ^{[3
]}

Esteves, Rui ^{[3
]}

Bai, Jian ^{[1
]}

Liu, Huafeng ^{[4
,5
]}

Kraft, Michael ^{[3
]}

机构：

[1] Zhejiang Univ, Coll Opt Sci & Engn, Hangzhou, Peoples R China

[2] Univ Liege, Dept Elect Engn & Comp Sci, Liege, Belgium

[3] Univ Leuven, ESAT MNS, Leuven, Belgium

[4] Huazhong Univ Sci & Technol, PGMF, Wuhan, Hubei, Peoples R China

[5] Huazhong Univ Sci & Technol, Sch Phys, Wuhan, Hubei, Peoples R China

来源：

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) | 2021年

关键词：

Accelerometer; micro-electro-mechanical systems (MEMS); electrostatic accelerometer; inertial sensor;

D O I：

10.1109/MEMS51782.2021.9375285

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a MEMS accelerometer with an auto-tuning system based on an electrostatic anti-spring. The sensitivity of the accelerometer can be tuned automatically to change its dynamic range and bandwidth according to acceleration inputs. A detailed theoretical analysis and experimental verification were conducted. There is a good agreement between experimental results theoretical calculations. The auto-tuning design has a larger displacement under different acceleration inputs, compared with a conventional design. When the acceleration input is 17.45 mu g, the sensitivity of the auto-tuning design (18.4 V/g) is 14.4 times of that of the conventional design (1.28 V/g). The sensitivity is higher for lower acceleration inputs.

引用

页码：184 / 187

页数：4

共 5 条

[1]

Fougerat A., 2018, EGUGA, P7188

[2] Sub-10 cm3 interferometric accelerometer with nano-g resolution [J].

Loh, NC ;

Schmidt, MA ;

Manalis, SR .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (03) :182-187

[3] Measurement of the Earth tides with a MEMS gravimeter [J].

Middlemiss, R. P. ;

Samarelli, A. ;

Paul, D. J. ;

Hough, J. ;

Rowan, S. ;

Hammond, G. D. .

NATURE, 2016, 531 (7596) :614-+

[4]

Tang SH, 2019, 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), P499, DOI [10.1109/transducers.2019.8808444, 10.1109/TRANSDUCERS.2019.8808444]

[5] Micromachined Accelerometers with Sub-μg/√Hz Noise Floor: A Review [J].

Wang, Chen ;

Chen, Fang ;

Wang, Yuan ;

Sadeghpour, Sina ;

Wang, Chenxi ;

Baijot, Mathieu ;

Esteves, Rui ;

Zhao, Chun ;

Bai, Jian ;

Liu, Huafeng ;

Kraft, Michael .

SENSORS, 2020, 20 (14)

← 1 →