Development of monolithic PZT microstage for the application of ultra high-density data storage

被引：0

作者：

Xu, HG ^{[1
]}

Okamoto, K ^{[1
]}

Zhang, DY ^{[1
]}

Ono, T ^{[1
]}

Esashi, M ^{[1
]}

机构：

[1] Tohoku Univ, Dept Nanomech, Sendai, Miyagi 980, Japan

来源：

TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2005年

关键词：

microstage; PZT; data storage; bimorph; FEM;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This paper presents the fabrication and characterizations of a compact PZT actuated microstage with multi degrees of freedom (DOFs). The entire device is fabricated in a symmetrically arrangement from a monolithic PZT plate with a size of 15x15x0.8 mm(3). Displacement amplification mechanisms are integrated in the structure to increase the stroke of PZT - actuators. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 mu m in x- and y-axes and 10 mu m in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

引用

页码：717 / 720

页数：4

共 5 条

[1] Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage [J].