Hydrogen in diamond-like carbon films

被引：6
作者：
Vainonen-Ahlgren, E
Tikkanen, P
Likonen, J
Rauhala, E
Keinonen, J
机构：
[1] Univ Helsinki, Accelerator Lab, FIN-00014 Helsinki, Finland
[2] Tech Res Ctr Finland, FIN-02044 VTT, Finland
来源：
JOURNAL OF NUCLEAR MATERIALS | 1999年 / 266卷
关键词：
diamond-like carbon; hydrogen; deuterium; migration;
D O I：
10.1016/S0022-3115(98)00682-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Properties of physical vapor deposited diamond-like carbon films and the migration of hydrogen in co-deposited samples were studied. Measurements utilizing Rutherford backscattering spectrometry and Doppler-shift-attenuation techniques were used to obtain the average mass density of the films. Distributions of co-deposited hydrogen and deuterium were measured by the nuclear resonance reaction H-1 (N-15,alpha gamma)C-12, and the elastic recoil detection technique, respectively. Secondary ion mass spectrometry was also used in combination with these two methods. It was observed that in H and CH4 co-deposited DLC films the temperature of H release varied between 950 and 1070 degrees C depending on the H concentration. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：975 / 979
页数：5
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