Silicon substrate orientation influence on structural and magnetic properties of BaFe12O19 thin films obtained by RF magneton sputtering

被引:3
作者
Rossi, Vinicius Pretti [1 ]
Bonini, Ricardo Pereira [1 ]
Goncalves, Andre Marino [1 ]
Gualdi, Alexandre Jose [1 ]
Eiras, Jose Antonio [1 ]
Zabotto, Fabio Luis [1 ]
机构
[1] Univ Fed Sao Carlos, Phys Dept, Sao Carlos, SP, Brazil
基金
巴西圣保罗研究基金会;
关键词
Thin films; Magnetoelectric composites; RF sputtering; Barium hexaferrite; In-plane orientation; BARIUM HEXAFERRITE FILMS; DEPOSITION; INPLANE; STRESS;
D O I
10.1016/j.jmmm.2020.166705
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work, the fabrication of BaFe12O19 (BaM) thin films by radio-frequency sputtering and the influence of substrate orientation on structural, microstructure and magnetic properties were carried out. Measurements pointed out the deposition time and power have no significant effect over stoichiometry in the studied condition, producing films with satisfying Fe:Ba rate confirmed by EDX analysis. The orientation of the Si substrate showed to be essentially correlated with in-plane orientation of BaM phase. Both Si (1 0 0) and (1 1 1) substrates privileged in-plane orientation of the c-axis of BaM and atomic force microscopy found needle-like grains spread randomly onto substrates, although Si (1 1 1) substrate exhibited higher magnetic anisotropy.
引用
收藏
页数:6
相关论文
共 33 条
[1]   Fabrication and micromagnetic modeling of barium hexaferrite thin films by RF magnetron sputtering [J].
Abuzir, Alaaedeen R. ;
Salman, Saed A. .
RESULTS IN PHYSICS, 2018, 8 :587-591
[2]   Ferrite devices and materials [J].
Adam, JD ;
Davis, LE ;
Dionne, GF ;
Schloemann, EF ;
Stitzer, SN .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2002, 50 (03) :721-737
[3]   The effects of deposition and annealing conditions on crystallographic properties of sputtered barium ferrite thick films [J].
Bayard, B ;
Chatelon, JP ;
Le Berre, M ;
Joisten, H ;
Rousseau, JJ ;
Barbier .
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 99 (1-2) :207-212
[4]   INFLUENCE OF CRYSTAL ORIENTATION ON SILICON SEMICONDUCTOR PROCESSING [J].
BEAN, KE ;
GLEIM, PS .
PROCEEDINGS OF THE IEEE, 1969, 57 (09) :1469-&
[5]   Measurement of the Anisotropy of Young's Modulus in Single-Crystal Silicon [J].
Boyd, Euan J. ;
Uttamchandani, Deepak .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 21 (01) :243-249
[6]   Magnetic properties of sputtered barium ferrite thick films [J].
Capraro, S ;
Chatelon, JP ;
Joisten, H ;
Le Berre, M ;
Bayard, B ;
Barbier, D ;
Rousseau, JJ .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (12) :9898-9901
[7]  
Cullity C.D., 2011, Introduction to Magnetic Materials, V2nd, DOI DOI 10.5860/CHOICE.47-0342
[8]   Magnetic anisotropy and field switching in cobalt ferrite thin films deposited by pulsed laser ablation [J].
Dhakal, T. ;
Mukherjee, D. ;
Hyde, R. ;
Mukherjee, P. ;
Phan, M. H. ;
Srikanth, H. ;
Witanachchi, S. .
JOURNAL OF APPLIED PHYSICS, 2010, 107 (05)
[9]   Stress-induced magnetic anisotropy in thick oriented NiZn-ferrite films on (100) MgO substrates [J].
Dorsey, PC ;
Rappoli, BJ ;
Grabowski, KS ;
Lubitz, P ;
Chrisey, DB ;
Horwitz, JS .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (10) :6884-6891
[10]   Influence of substrate temperature on the texture of barium ferrite film by magnetron sputtering [J].
Guo, Zeyu ;
Zhang, Wanli ;
Ji, Hong ;
Peng, Bin ;
Zhang, Wenxu .
APPLIED SURFACE SCIENCE, 2009, 255 (08) :4443-4445