Electrostrictive elastomer based diffractive modulator for use as a variable optical attenuator

被引：0

作者：

Uma, S ^{[1
]}

Matusiak, R ^{[1
]}

Hecht, DL ^{[1
]}

Shrader, EJ ^{[1
]}

机构：

[1] Palo Alto Res Ctr Inc, Device Hardware Lab, Palo Alto, CA 94304 USA

来源：

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2003年

关键词：

D O I：

10.1109/OMEMS.2003.1233479

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Device structure and measurements on an elastomer based MEMS modulator is reported. The configurable reflective phase grating responds to voltage and the surface corrugates to a sinusoidal pattern enabling analog control of the diffracted intensity.

引用

页码：85 / 86

页数：2

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