Characterization of Piezoelectric Microgenerator with Nanobranched ZnO Grown on a Polymer Coated Flexible Substrate

In this paper, results from the fabrication and study of a piezoelectric microgenerator using nanobranched zinc oxide (ZnO) film grown on poly(3,4-ethylenedioxythiphene) doped with a sulfonate (PEDOT: PSS)-coated flexible substrate are presented. The aim of the study is to extract information about the electrical behavior of the harvester at different frequencies, temperatures, and positions, as related to the ZnO nanostructure, as well as to examine its piezoelectric response. Radiofrequency (RF) sputtering with oxygen deficit during growth on an amorphous sublayer was used to obtain the nanobranched structure. The microdevice was studied at frequencies ranging from 1 Hz to 1 MHz for temperatures in the range of -10 degrees C to 40 degrees C, in both a non-bended position, and a radius of curvature position bended to 12 mm. It was found that non-ordered ZnO nanoformations facilitate the dipoles' motion, thus leading to low dielectric losses of 10(-3), and a higher relative permittivity of epsilon(r) similar to 15, compared with typically known values. The losses increase with one order of magnitude at bending, but still remain low. Dielectric characteristics indicate that the favorable working range of the microgenerator is within the lower frequency region, from 10 Hz to 10 kHz. The results were confirmed by the measured open circuit voltage, which reaches approximately 1 V within this range, versus 300 mV out of the range.