Phosphorus-diffused silicon solar cell emitters with plasma enhanced chemical vapor deposited silicon carbide

被引:13
作者
Orpella, A [1 ]
Vetter, M [1 ]
Ferré, R [1 ]
Martín, I [1 ]
Puigdollers, J [1 ]
Voz, C [1 ]
Alcubilla, R [1 ]
机构
[1] Univ Politecn Cataluna, Dept Elect Engn, ES-08034 Barcelona, Spain
关键词
amorphous silicon carbide (a-SIC : H(n)); solar cells; emitter saturation current density; passivation;
D O I
10.1016/j.solmat.2004.08.021
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
We propose the use of annealed phosphorus doped amorphous silicon carbide layers (a-SiC:H(n)) deposited by PECVD as emitters in solar cells and explore the effect of the annealing time on the emitter saturation current density (J(OC)). We use the quasy-steady state photoconductance method to determine the dependence of effective lifetime on excess carrier density and from these measurements we obtain J(OC) values in the range of 300 fA cm(-2) for sheet resistances around 100 Omega/sq. Finally, we obtain effective surface recombination velocity values around 10(4) cm s(-1) by fitting the measured J(OC) values with PC1D simulated ones. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:667 / 674
页数:8
相关论文
共 50 条
  • [21] Plasma enhanced chemical vapor deposition of silicon under relatively high pressure conditions
    Amanatides, E
    Lykas, B
    Mataras, D
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) : 372 - 373
  • [22] EFFECTIVE GaN SURFACE PASSIVATION BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON OXIDE
    Chakroun, A.
    Jaouad, A.
    Giguere, A.
    Aimez, V.
    Ares, R.
    INTERNATIONAL JOURNAL OF NANOSCIENCE, 2012, 11 (04)
  • [23] Polymorphous silicon thin films obtained by plasma-enhanced chemical vapor deposition using dichlorosilane as silicon precursor
    Remolina, A.
    Monroy, B. M.
    Garcia-Sanchez, M. F.
    Ponce, A.
    Bizarro, M.
    Alonso, J. C.
    Ortiz, A.
    Santana, G.
    NANOTECHNOLOGY, 2009, 20 (24)
  • [24] Effect of Silver-Assisted Chemical Vapor Etching on morphological properties and silicon solar cell performance
    Amri, Chohdi
    Ouertani, Rachid
    Hamdi, Abderrahmen
    Ezzaouia, Hatem
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2017, 63 : 176 - 183
  • [25] In situ phosphorus-doped polycrystalline silicon films by low pressure chemical vapor deposition for contact passivation of silicon solar cells
    Firat, Meric
    Radhakrishnan, Hariharsudan Sivaramakrishnan
    Payo, Maria Recaman
    Duerinckx, Filip
    Tous, Loic
    Poortmans, Jef
    SOLAR ENERGY, 2022, 231 : 78 - 87
  • [26] Homojunction and heterojunction silicon solar cells deposited by low temperature-high frequency plasma enhanced chemical vapour deposition
    Plá, J
    Centurioni, E
    Summonte, C
    Rizzoli, R
    Migliori, A
    Desalvo, A
    Zignani, F
    THIN SOLID FILMS, 2002, 405 (1-2) : 248 - 255
  • [27] Effects of seeding methods on the fabrication of microcrystalline silicon solar cells using radio frequency plasma enhanced chemical vapor deposition
    Li, YM
    Li, LW
    Selvan, JAA
    Delahoy, AE
    Levy, RA
    THIN SOLID FILMS, 2005, 483 (1-2) : 84 - 88
  • [28] Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film
    Liu Li-Ying
    Zhang Jia-Liang
    Guo Qing-Chao
    Wang De-Zhen
    ACTA PHYSICA SINICA, 2010, 59 (04) : 2653 - 2660
  • [29] Microstructure characterization of microcrystalline silicon thin films deposited by very high frequency plasma-enhanced chemical vapor deposition by spectroscopic ellipsometry
    Zhang, He
    Zhang, Xiaodan
    Wei, Changchun
    Sun, Jian
    Geng, Xinhua
    Xiong, Shaozhen
    Zhao, Ying
    THIN SOLID FILMS, 2011, 520 (02) : 861 - 865
  • [30] Effect of Three Different Masks Configuration on the Electrical Characteristics of Amorphous Silicon Solar Cells using Plasma Enhanced Chemical Vapor Deposition
    Belrhiti Alaoui, Kawtar
    Laalioui, Saida
    Ikken, Badr
    Outzourhit, Abdelkader
    2018 6TH INTERNATIONAL RENEWABLE AND SUSTAINABLE ENERGY CONFERENCE (IRSEC), 2018, : 202 - 205