DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION

被引：0

作者：

Liang, Boshen ^{[1
,2
]}

Paquet, Louis ^{[1
]}

Jeong, Yongbin ^{[1
,2
]}

Heremans, Paul ^{[1
,2
]}

Cheyns, David ^{[1
]}

机构：

[1] IMEC, Leuven, Belgium

[2] Katholieke Univ Leuven, Leuven, Belgium

来源：

2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2021年

关键词：

Micropump; Nozzle/Diffuser; Lab-on-Chip; Vorticity; Optimization; ELEMENTS;

D O I：

10.1109/NEMS51815.2021.9451478

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this study, a 3D acoustic-solid interaction model is combined with a time-dependent vorticity enhancement method for design optimization of nozzle/diffuser micropumps. Compared with the conventional method where static pressure loss ratio is used as the performance indicator of individual nozzle/diffuser element, the vortex method provides a direct and good prediction of output characteristics of the micropumps. An integrated piezoelectric micropump prototype is fabricated with flat-panel display compatible processing techniques. The frequency characterization shows good agreement of the micropump working frequency with that predicted by finite element simulation where additional damping effects are considered. A high-speed particle image velocimetry shows successfully the movement of fluid elements driven by the piezoelectric actuator.

引用

页码：1423 / 1426

页数：4

共 9 条

[1] Modeling and process design optimization of a piezoelectric micromachined ultrasonic transducers (PMUT) using lumped elements parameters [J].