Nanostructured tungsten oxide thin films by the reactive pulsed laser deposition technique

被引:68
作者
Lethy, K. J. [1 ]
Beena, D. [1 ]
Kumar, R. Vinod [1 ]
Pillai, V. P. Mahadevan [1 ]
Ganesan, V. [2 ]
Sathe, V. [2 ]
Phase, D. M. [2 ]
机构
[1] Univ Kerala, Dept Optoelect, Thiruvananthapuram 695581, Kerala, India
[2] Inter Univ Consortium DAE Facil, Indore 452017, Madhya Pradesh, India
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 91卷 / 04期
关键词
D O I
10.1007/s00339-008-4492-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Preparation of nanostructured tungsten oxide thin films using the reactive pulsed laser ablation technique is reported. The structural, morphological, optical and electrical properties of deposited films are systematically studied by changing the ambient oxygen pressure (pO(2)). Structural dependence of tungsten oxide films on ambient oxygen pressure is discussed using grazing incidence X-ray diffraction (GIXRD) and micro-Raman spectra. The section analysis using atomic force microscopy exposed the smooth surface features of the deposited films. The blue shift in optical bandgap with an increase in ambient oxygen pressure is expounded in terms of electronic band structure of tungsten oxide. The influence of oxygen pressure on optical constants like extinction coefficient, band edge sharpness, refractive index and optical bandgap is also conveyed. The temperature variation of electrical resistance for films deposited at 0.12 mbar furnishes evidence for its semiconducting nature.
引用
收藏
页码:637 / 649
页数:13
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