共 20 条
- [2] BURRELL MC, 1987, SURFACE INTERFACE AN, V11, P487
- [3] OXIDATION AT THE POLYIMIDE CU INTERFACE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (05): : 3008 - 3011
- [6] HOFFMAN RW, 1966, PHYS THIN FILMS, V3, P219
- [7] MEASUREMENT OF STRAINS AT SI-SIO2 INTERFACE [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (06) : 2429 - +
- [8] ADHESION OF POLYIMIDE TO SILICON AND POLYIMIDE [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1993, 47 (07) : 1219 - 1232