UV-Curable Technique of Magnetic Roller Soft Mold and Microstructure Pattern Replication

被引:7
|
作者
Weng, Y. J. [1 ]
机构
[1] Natl Chiayi Univ, Dept Mech & Energy Engn, Chiayi 600, Taiwan
关键词
FILM-TRANSISTOR DEVICES; NANOIMPRINT LITHOGRAPHY; IMPRINT LITHOGRAPHY; LIGA PROCESS; TO-ROLL; FABRICATION; SURFACE; PLASMA; RESIST;
D O I
10.3139/217.2965
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
This study adopted the novel magnetic roller soft mold embossing technique of the soft mold preparation method, embossing, combined with the existing gas-assisted UV-curable technique, to develop an innovative magnetic-assisted continuous roller platform. Using the advantages of uniform and accurate control of applied pressure of the magnetic disk, this study used the magnetic roller soft mold embossing and UV-curable technique for replicating microstructure patterns, resulting in a more mature micro-nano embossing technology and application. The experimental results showed that the new magnetic roller soft mold preparation method can accurately cast and replicate micro-nano structures of Polydimethylsiloxane (PDMS) composite magnetic iron powder, and the magnetic disk can impose uniform pressure to effectively implement complete filling during the rolling process. This innovative process provides a simple and rapid molding mechanism, which significantly improves the microstructure pattern replication technique.
引用
收藏
页码:63 / 69
页数:7
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