Nanoimprint of a 3D structure on an optical fiber for light wavefront manipulation

被引:30
作者
Calafiore, Giuseppe [1 ]
Koshelev, Alexander [1 ]
Allen, Frances I. [2 ,3 ]
Dhuey, Scott [3 ]
Sassolini, Simone [3 ]
Wong, Edward [3 ]
Lum, Paul [2 ]
Munechika, Keiko [1 ]
Cabrini, Stefano [3 ]
机构
[1] aBeam Technol Inc, 22290 Foothill Blvd St 2, Hayward, CA 94541 USA
[2] Univ Calif Berkeley, Biomol Nanotechnol Ctr QB3, Stanley Hall, Berkeley, CA 94720 USA
[3] Lawrence Berkeley Natl Lab, Mol Foundry, One Cyclotron Rd, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
nanoimprint lithography; optical fiber; 3D nanofabrication; helium ion beam; grayscale milling; focus ion beam; fiber optic sensor; FOCUSED ION-BEAM; TIP; FABRICATION;
D O I
10.1088/0957-4484/27/37/375301
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Integration of complex photonic structures onto optical fiber facets enables powerful platforms with unprecedented optical functionalities. Conventional nanofabrication technologies, however, do not permit viable integration of complex photonic devices onto optical fibers owing to their low throughput and high cost. In this paper we report the fabrication of a three-dimensional structure achieved by direct nanoimprint lithography on the facet of an optical fiber. Nanoimprint processes and tools were specifically developed to enable a high lithographic accuracy and coaxial alignment of the optical device with respect to the fiber core. To demonstrate the capability of this new approach, a 3D beam splitter has been designed, imprinted and optically characterized. Scanning electron microscopy and optical measurements confirmed the good lithographic capabilities of the proposed approach as well as the desired optical performance of the imprinted structure. The inexpensive solution presented here should enable advancements in areas such as integrated optics and sensing, achieving enhanced portability and versatility of fiber optic components.
引用
收藏
页数:6
相关论文
共 13 条
[1]   Axicon lens on optical fiber forming optical tweezers, made by focused ion beam milling [J].
Cabrini, S ;
Liberale, C ;
Cojoc, D ;
Carpentiero, A ;
Prasciolu, M ;
Mora, S ;
Degiorgio, V ;
De Angelis, F ;
Di Fabrizio, E .
MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) :804-807
[2]   Step-and-repeat nanoimprint on pre-spin coated film for the fabrication of integrated optical devices [J].
Calafiore, Giuseppe ;
Koshelev, Alexander ;
Dhuey, Scott ;
Sassolini, Simone ;
Messerschmidt, Martin ;
Schleunitz, Ame ;
Goltsov, Alexander ;
Pina-Hernandez, Carlos ;
Pirri, Fabrizio C. ;
Yankov, Vladimir ;
Cabrini, Stefano ;
Peroz, Christophe .
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2015, 14 (03)
[3]   Multilayer lift-off process for sub-15-nm patterning by step-and-repeat ultraviolet nanoimprint lithography [J].
Calafiore, Giuseppe ;
Dhuey, Scott ;
Sassolini, Simone ;
Alayo, Nerea ;
Gosselin, David ;
Vogler, Marko ;
Olynick, Deirdre ;
Peroz, Christophe ;
Cabrini, Stefano .
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2014, 13 (03)
[4]   Lab-on-Fiber Technology: Toward Multifunctional Optical Nanoprobes [J].
Consales, Marco ;
Ricciardi, Armando ;
Crescitelli, Alessio ;
Esposito, Emanuela ;
Cutolo, Antonello ;
Cusano, Andrea .
ACS NANO, 2012, 6 (04) :3163-3170
[5]   Fibre-top cantilevers: design, fabrication and applications [J].
Iannuzzi, D. ;
Heeck, K. ;
Slaman, M. ;
de Man, S. ;
Rector, J. H. ;
Schreuders, H. ;
Berenschot, J. W. ;
Gadgil, V. J. ;
Sanders, R. G. P. ;
Elwenspoek, M. C. ;
Deladi, S. .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2007, 18 (10) :3247-3252
[6]   The Optical Fiber Tip: An Inherently Light-Coupled Microscopic Platform for Micro- and Nanotechnologies [J].
Kostovski, Gorgi ;
Stoddart, Paul R. ;
Mitchell, Arnan .
ADVANCED MATERIALS, 2014, 26 (23) :3798-3820
[7]   Sub-15nm Optical Fiber Nanoimprint Lithography: A Parallel, Self-aligned and Portable Approach [J].
Kostovski, Gorgi ;
Chinnasamy, Udayakumar ;
Jayawardhana, Sasani ;
Stoddart, Paul R. ;
Mitchell, Arnan .
ADVANCED MATERIALS, 2011, 23 (04) :531-+
[8]   A reflection-based localized surface plasmon resonance fiber-optic probe for biochemical sensing [J].
Lin, Yongbin ;
Zou, Yang ;
Lindquist, Robert G. .
BIOMEDICAL OPTICS EXPRESS, 2011, 2 (03) :478-484
[9]   Review of iterative Fourier-transform algorithms for beam shaping applications [J].
Ripoll, O ;
Kettunen, V ;
Herzig, HP .
OPTICAL ENGINEERING, 2004, 43 (11) :2549-2556
[10]   Metal Grating Patterning on Fiber Facets by UV-Based Nano Imprint and Transfer Lithography Using Optical Alignment [J].
Scheerlinck, Stijn ;
Dubruel, Peter ;
Bienstman, Peter ;
Schacht, Etienne ;
Van Thourhout, Dries ;
Baets, Roel .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2009, 27 (10) :1417-1422