Progress in X-ray optics development with formed glass and Si wafers

被引：0

作者：

Hudec, R. ^{[1
]}

Pina, L. ^{[2
,3
]}

Semencova, V. ^{[2
,4
]}

Skulinova, M. ^{[1
]}

Inneman, A. ^{[2
]}

Sveda, L. ^{[2
,3
]}

Mika, M. ^{[4
]}

Kacerovsky, R. ^{[4
]}

Prokop, J. ^{[4
]}

Cerny, M. ^{[5
]}

机构：

[1] Acad Sci Czech Republic, Inst Astron, CS-25165 Ondrejov, Czech Republic

[2] Ctr Adv X ray Technol, Prague, Czech Republic

[3] Czech Tech Univ, Fac Nucl Sci, Prague, Czech Republic

[4] Inst Chem Technol, Prague, Czech Republic

[5] Acad Sci Czech Republic, Inst Rock Struct & Mech, Prague, Czech Republic

来源：

OPTICS FOR EUV, X-RAY, AND GAMMA-RAY ASTRONOMY III | 2007年 / 6688卷

关键词：

D O I：

10.1117/12.731727

中图分类号：

P1 [天文学];

学科分类号：

0704 ;

摘要：

The precisely shaped glass sheets and Si wafers are generally considered as the most promising substrates for future large space astronomical X-ray telescopes. Both approaches have demonstrated promising results obtained in the course of last years. In this contribution, we report on continued systematic efforts and analysis in precise shaping of thin glass sheets as well as Si wafers. New results will be briefly presented and discussed. For Si wafers, recent efforts focus also on improving the intrinsic quality of the slices to better meet the high requirements of future space projects.

引用

页数：10

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