Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process

被引：3

作者：

Calvez, Stephane ^{[1
]}

Calmon, Pierre-Francois ^{[1
]}

Arnoult, Alexandre ^{[1
]}

Gauthier-Lafaye, Olivier ^{[1
]}

Fontaine, Chantal ^{[1
]}

Almuneau, Guilhem ^{[1
]}

机构：

[1] Univ Toulouse, CNRS, LAAS, 7 Ave Colonel Roche, F-31400 Toulouse, France

来源：

OPTICS EXPRESS | 2017年 / 25卷 / 16期

关键词：

OXIDATION; LASERS;

D O I：

10.1364/OE.25.019275

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, we demonstrate that buried oxide-confined waveguides can be formed using a lateral oxidation process carried out through a discrete set of small-diameter via-holes instead of the conventional scheme where the oxidation starts from the edges of etched mesas. The via-hole oxidation is shown to lead to straight waveguides with smooth oxide/semiconductor interfaces and whose propagation losses are similar to one obtained using the standard process but with the advantage of maintaining a quasi-planar wafer surface. It thereby paves the way towards a simplification of the fabrication of III-Vsemiconductor-oxide photonic devices. (C) 2017 Optical Society of America

引用

页码：19275 / 19280

页数：6

共 50 条

[1] Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator
Webster, MA
Pafchek, RM
Sukumaran, G
Koch, TL
APPLIED PHYSICS LETTERS, 2005, 87 (23) : 1 - 3
[2] Low-Loss Waveguides by Planar Modified Chemical Vapor Deposition
Yevnin, Maya
Atar, Gil
Campelj, Stanislav
Lenardic, Borut
Kaplan, Natan
Sherman, Valery
Gvishi, Raz
Sfez, Bruno
Eger, David
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2020, 38 (04) : 792 - 796
[3] Low-Loss Planar Optical Waveguides Fabricated From Polycarbonate
Chen, Jian-guo
Zhang, Tong
Zhu, Jin-song
Zhang, Xiao-yang
Zhou, Jing-lun
Fan, Jiang-feng
Hu, Guo-hua
POLYMER ENGINEERING AND SCIENCE, 2009, 49 (10): : 2015 - 2019
[4] NEW GENERALIZED COMPUTATIONS OF QUASI-PLANAR WAVEGUIDES CHARACTERISTICS.
Wu, K.
Coumes, A.
Saguet, P.
1600, (08):
[5] Low-loss TiO2 planar waveguides for nanophotonic applications
Bradley, J. D. B.
Evans, C. C.
Parsy, F.
Phillips, K. C.
Senaratne, R.
Marti, E.
Mazur, E.
2010 23RD ANNUAL MEETING OF THE IEEE PHOTONICS SOCIETY, 2010, : 313 - 314
[6] Planar Porous THz Waveguides for Low-Loss Guidance and Sensing Applications
Markov, Andrey
Mazhorova, Anna
Skorobogatiy, Maksim
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, 2013, 3 (01) : 96 - 102
[7] Efficient second harmonic generation in low-loss planar GaN waveguides
Gromovyi, Maksym
Brault, Julien
Courville, Aimeric
Rennesson, Stephanie
Semond, Fabrice
Feuillet, Guy
Baldi, Pascal
Boucaud, Philippe
Duboz, Jean-Yves
De Micheli, Marc P.
OPTICS EXPRESS, 2017, 25 (19): : 23035 - 23044
[8] Low-loss and highly polarized emission from planar polymer waveguides
Camposeo, A
Mele, E
Persano, L
Pisignano, D
Cingolani, R
OPTICS LETTERS, 2006, 31 (10) : 1429 - 1431
[9] Low-loss integrated planar chalcogenide waveguides for microfluidic chemical sensing
Hu, Juejun
Tarasov, Vladimir
Carlie, Nathan
Sun, Rong
Petit, Laeticia
Agarwal, Anu
Richardson, Kathleen
Kimerling, Lionel
ULTRASENSITIVE AND SINGLE-MOLECULE DETECTION TECHNOLOGIES II, 2007, 6444
[10] Low-loss measurement in partially buried optical waveguides on glass with a plastic prism
Sch. of Elec. and Electron. Eng., Nanyang Technological University, Nanyang Avenue, Singapore 639798, Singapore
不详
不详
Appl. Opt., 21 (5089-5090):

← 1 2 3 4 5 →