Determination of the states of oxidation of metals in thin oxide films by X-ray photoelectron spectroscopy

被引:42
作者
Alov, NV [1 ]
机构
[1] Moscow MV Lomonosov State Univ, Dept Chem, Moscow 119992, Russia
关键词
D O I
10.1007/s10809-005-0114-x
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The states of oxidation of molybdenum, tungsten, niobium, and tantalum in thin oxide films of variable composition were determined by X-ray photoelectron spectroscopy. It was found that the metals occurred in different states of oxidation in thin oxide films prepared by the irradiation of metal surfaces with low-energy oxygen ions under high-vacuum conditions. The concentrations of metals in different states of oxidation essentially depend on the radiation dose and the reactivity of metals.
引用
收藏
页码:431 / 435
页数:5
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