Interferometric measurements of displacement on a diffusing target by a speckle tracking technique

被引:87
作者
Norgia, M [1 ]
Donati, S [1 ]
D'Alessandro, D [1 ]
机构
[1] Univ Pavia, Dipartimento Elettr, I-27100 Pavia, Italy
关键词
laser measurements; optical feedback; optical interferometry; rough surfaces; semiconductor lasers; speckle;
D O I
10.1109/3.922778
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Operation of a laser interferometer with a noncooperative target surface, and on a substantial span of displacement (1 m), is reported for the first time to our knowledge In the paper, we first analyze the errors of an interferometer operating in the speckle pattern regime, then propose the technique of tracking the speckle relative maximum amplitude as a solution far problems so far preventing interferometric measurements of large displacements. Examples of the speckle-statistics improvements are reported. Residual errors are of the order of few wavelengths on a I-m displacement, indicating that a 10(-6)-class instrument can be developed. The proposed approach has been implemented with an injection interferometer.
引用
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页码:800 / 806
页数:7
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